JPH0258711A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH0258711A JPH0258711A JP20910488A JP20910488A JPH0258711A JP H0258711 A JPH0258711 A JP H0258711A JP 20910488 A JP20910488 A JP 20910488A JP 20910488 A JP20910488 A JP 20910488A JP H0258711 A JPH0258711 A JP H0258711A
- Authority
- JP
- Japan
- Prior art keywords
- thin
- films
- metal
- magnetic
- chromium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 39
- 229910052751 metal Inorganic materials 0.000 claims abstract description 26
- 239000002184 metal Substances 0.000 claims abstract description 26
- 239000010409 thin film Substances 0.000 claims abstract description 26
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 21
- 239000011651 chromium Substances 0.000 claims abstract description 21
- 239000010408 film Substances 0.000 claims abstract description 21
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 9
- 230000004907 flux Effects 0.000 claims abstract description 7
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 7
- 239000003302 ferromagnetic material Substances 0.000 claims description 6
- UCNNJGDEJXIUCC-UHFFFAOYSA-L hydroxy(oxo)iron;iron Chemical compound [Fe].O[Fe]=O.O[Fe]=O UCNNJGDEJXIUCC-UHFFFAOYSA-L 0.000 claims description 5
- 229910000859 α-Fe Inorganic materials 0.000 abstract description 17
- 229910000702 sendust Inorganic materials 0.000 abstract description 15
- 238000009792 diffusion process Methods 0.000 abstract description 12
- 230000005294 ferromagnetic effect Effects 0.000 abstract description 7
- 230000008646 thermal stress Effects 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract 2
- 238000004299 exfoliation Methods 0.000 abstract 1
- 235000012054 meals Nutrition 0.000 abstract 1
- 229920000136 polysorbate Polymers 0.000 abstract 1
- 239000011162 core material Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 5
- 238000004804 winding Methods 0.000 description 4
- 230000002265 prevention Effects 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000007499 fusion processing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/1871—Shaping or contouring of the transducing or guiding surface
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
産−業ユj1打旧mlW
本発明は、金属系磁気記録媒体等に高密度記録できるM
I G (Me t a I −I n−Gap)形磁
気ヘッドに係り、特に金属強磁性体形成面がギャップと
平行な磁気ヘッド(以下平行形MIGと呼ぶ)の特性を
改善イる製造技術に関する。[Detailed Description of the Invention] The present invention provides a magnetic recording medium capable of high-density recording on metal-based magnetic recording media, etc.
This invention relates to IG (Meta I-I n-Gap) type magnetic heads, and in particular to manufacturing technology for improving the characteristics of magnetic heads in which the metal ferromagnetic material forming surface is parallel to the gap (hereinafter referred to as parallel type MIG). .
礼来Δ皮4
例えば、一般的な平行形MIGヘンドについて第6図を
参照して以下に説明する。For example, a general parallel MIG hend will be described below with reference to FIG. 6.
第6図(a)に示すように一対の金属酸化物強磁性体で
あるフェライトからなる磁気コア21゜22のギャップ
形成面に、センダスト等の高飽和磁束密度を有する金属
薄膜23を形成し、更に非磁性薄膜24をギャップスペ
ーサとして形成した後カラスで接合一体化されて平行形
MIGヘノトコアチップが形成される。As shown in FIG. 6(a), a metal thin film 23 having a high saturation magnetic flux density, such as Sendust, is formed on the gap forming surfaces of a pair of magnetic cores 21 and 22 made of ferrite, which is a metal oxide ferromagnetic material, and Furthermore, a non-magnetic thin film 24 is formed as a gap spacer, and then joined together with a glass to form a parallel MIG henoto core chip.
ところがこの形の磁気ヘッドでは、センダスト膜とフェ
ライトコアの境界面27が磁気ギャップ形成面と平行で
あるため疑似ギャップ面として作用し再生信号に疑似信
号が入っていた。However, in this type of magnetic head, since the boundary surface 27 between the sendust film and the ferrite core is parallel to the magnetic gap forming surface, it acts as a pseudo gap surface and a pseudo signal is included in the reproduced signal.
そこで、バッファ層としてパーマロイやクロムと云った
金属薄膜を介在させてセンダストとフェライト界面の熱
応力歪を小さくさせたり、界面の接合強度を上げるよう
な方法が提案されている。Therefore, methods have been proposed in which a thin metal film such as permalloy or chromium is interposed as a buffer layer to reduce the thermal stress strain at the interface between sendust and ferrite, and to increase the bonding strength at the interface.
これらの金属薄膜も熱応力歪には効果があるがフェライ
ト中の酸素原子の金属原子との結合による還元及びセン
ダストへの金属原子拡散等で接合部界面近傍での磁気特
性劣化等には効果がなかった。Although these metal thin films are effective against thermal stress distortion, they are not effective against deterioration of magnetic properties near the joint interface due to reduction due to the bonding of oxygen atoms in ferrite with metal atoms and diffusion of metal atoms into sendust. There wasn't.
そこで、第6図(b)に示すように非常に薄い拡散防止
膜として、センダストとフェライトの接合界面に非磁性
酸化物であるM2O3や5102の薄膜26を形成する
方法が提案されている。Therefore, as shown in FIG. 6(b), a method has been proposed in which a thin film 26 of non-magnetic oxide M2O3 or 5102 is formed at the junction interface between sendust and ferrite as a very thin diffusion prevention film.
よ′
ところで、これらの拡散防止膜によりフェライトの特性
劣化層の生成は、抑止出来るが、非磁性層のため膜厚が
薄いと、それ自身が疑似ギャップを構成したり、膜厚が
薄いと拡散防止出来なかったりするため、300〜60
0Aと非常に狭い範囲に拡散防止膜の膜厚を制御するこ
とが必要であった。By the way, these diffusion prevention films can prevent the formation of a layer with deteriorated ferrite properties, but since they are non-magnetic layers, if the film is thin, it may itself form a pseudo gap, or if the film is thin, diffusion may occur. 300-60 as it may not be possible to prevent
It was necessary to control the thickness of the diffusion prevention film within a very narrow range of 0A.
その上、フェライトと拡散防止膜、及びセンダストと拡
散防止膜との間は、相互拡散が防止されるため、接合強
度が弱くセンダストとフェライトの熱応力差を吸収出来
ず剥離が生ずると云う問題もあった。Furthermore, since mutual diffusion is prevented between the ferrite and the anti-diffusion film, and between the sendust and the anti-diffusion film, the bonding strength is weak and the difference in thermal stress between the sendust and the ferrite cannot be absorbed, resulting in peeling. there were.
1 こめの−
本発明は上記の問題点に鑑みて提案するもので、金属酸
化物強磁性体と高飽和磁束密度を有する金属薄膜との間
の一部に非磁性会者酸化物薄膜を、残部に金属クロム薄
膜を形成することを特徴としたものである。1. The present invention is proposed in view of the above problems, and includes a non-magnetic ferromagnetic oxide thin film in a part between the metal oxide ferromagnetic material and the metal thin film having high saturation magnetic flux density. The feature is that a thin metal chromium film is formed on the remaining part.
1肛
本発明によれば、非磁性会掛酸化物薄膜と金属クロム膜
をセンダストとフェライトの界面に分散して交互に作成
したため、センダスト及びフェライトの接合面に金属ク
ロムによる特性劣化層か波形に形成され、それが磁気ギ
ャップと非平行になるため、疑似ギャップとして働かな
い。1.According to the present invention, since the non-magnetic oxide thin film and the metallic chromium film are dispersed and created alternately at the interface between the sendust and the ferrite, a property-degrading layer due to the metallic chromium or a corrugated shape is formed on the joint surface of the sendust and the ferrite. formed and it is nonparallel to the magnetic gap, so it does not act as a pseudogap.
しかも、金属クロム、薄膜形成部では相互拡散による接
合強度の向上で、熱応力に対しても界面剥離等が生じな
い。In addition, in the metallic chromium and thin film formed portion, the bonding strength is improved by mutual diffusion, so that interfacial peeling does not occur even under thermal stress.
実」1例−
本発明の一つの実施例について第1図乃至第2図を参照
して説明する。One Practical Example - One embodiment of the present invention will be described with reference to FIGS. 1 and 2.
第2図に示すように、まず一対のフェライト等の強磁性
金属酸化物コア素材1,2を準備し、通常の加工法と同
じように巻線係止溝3、巻線窓溝4、ガラス溝5、トラ
ック溝6を切削形成する。As shown in Fig. 2, first, a pair of ferromagnetic metal oxide core materials 1 and 2 such as ferrite are prepared, and the winding locking groove 3, winding window groove 4, glass Grooves 5 and track grooves 6 are formed by cutting.
次に第3図に示すように一方のコアの磁気ギャップ形成
面にマスキングしてトラック巾方向にストライプ状に非
磁性酸化物(例えばAe20a)薄膜7を50〜800
i程度スパッタリング被着形成する。Next, as shown in FIG. 3, the magnetic gap forming surface of one core is masked and a thin film 7 of non-magnetic oxide (for example, Ae20a) is applied in stripes in the track width direction at a thickness of 50 to 800 nm.
Form by sputtering about i.
次にマスクをずらして非磁性酸化物の被着していない部
分に金属クロム8をほぼ同じ厚さにスパッタ被着形成す
る。Next, the mask is shifted and metal chromium 8 is sputtered to approximately the same thickness on the portions where the nonmagnetic oxide is not deposited.
更にその上に第4図に示す様にセンダスト等の強磁性金
属薄膜9を2〜10μ厚に、更にギヤ・ツブスペーサと
なる5102等の非磁性体薄膜10を所定厚スパンタリ
ング被着形成する。Furthermore, as shown in FIG. 4, a ferromagnetic metal thin film 9 such as sendust is formed to a thickness of 2 to 10 μm, and a non-magnetic thin film 10 such as 5102, which will become a gear tube spacer, is sputtered to a predetermined thickness.
次いで両方のコアブロックを安定させガラスを流し込み
一体化してスライスして、第1図のような磁気へラドコ
アチップ11を得る。Next, both core blocks are stabilized, glass is poured in them, and the core blocks are integrated and sliced to obtain a magnetic rad core chip 11 as shown in FIG.
このようにして作られた磁気へラドコアチップは、ガラ
ス融着工程での高温加熱により金属クロム薄膜形成部近
傍のセンダスト部及びフェライト部に各々金属クロム拡
散層及び還元層がトラック巾方向に波形12に形成され
る。In the magnetic herad core chip made in this way, a metal chromium diffusion layer and a reduction layer are formed in the sendust part and ferrite part near the metal chromium thin film forming part in a waveform 12 in the track width direction by high-temperature heating in the glass fusing process. is formed.
これ等の金属クロム拡散層及び還元層は透磁率が劣化し
ているため副ギャップを形成するが主ギャップと、非平
行であるため、疑似ギャップとしては作用しない。These metal chromium diffusion layers and reduced layers have deteriorated magnetic permeability, so they form a sub-gap, but since they are non-parallel to the main gap, they do not act as a pseudo-gap.
又、これらの相互拡散層は強固な接合を形成するためセ
ンダストとフェライトの熱応力による界面剥離を生じな
い。Furthermore, since these interdiffused layers form a strong bond, interfacial separation between sendust and ferrite due to thermal stress does not occur.
以上のように非磁性酸化物層とクロム層をトラック中と
垂直なストライプ状に形成した例について説明したか、
第5図に示した様に網目状に形成しても良い。Did we explain the example above in which the nonmagnetic oxide layer and chromium layer are formed in stripes perpendicular to the track?
It may also be formed in a mesh shape as shown in FIG.
又、該薄膜はマスクを使用して形成する方法で説明した
かフォトリソグラフィの技術を利用してエツチング等の
方法で形成してもよい。Further, the thin film may be formed by a method such as etching using a photolithography technique instead of the method described above in which it is formed using a mask.
光」Rと板果−
本発明は以−1−説明したように金属酸化物強磁性体と
高飽和磁束密度を有する金属薄膜との間に非磁性参跣酸
化物薄膜と金属クロム薄膜をトラック1】方向にストラ
イプ状に又は網目状に交互に形成したから、後工程での
ガラス融着等の高温熱処理により金属クロムがセンダス
ト及びフェライトの接合面に拡散し、特性劣化層か波形
に形成され、それが磁気ギャップと非平行になるため疑
似ギャップとして働かない。Light'R and Plate - As described below, the present invention tracks a non-magnetic ferromagnetic oxide thin film and a metal chromium thin film between a metal oxide ferromagnetic material and a metal thin film having a high saturation magnetic flux density. 1) Since they are formed alternately in stripes or meshes in the direction, metallic chromium is diffused into the bonding surface of sendust and ferrite during high-temperature heat treatment such as glass fusion in the later process, and a layer with deteriorated properties or a corrugated shape is formed. , it does not work as a pseudo gap because it is non-parallel to the magnetic gap.
しかも、金属クロム薄膜形成部では相互拡散による接合
強度が向上するため熱応力に対しても界面剥離等が生じ
ない。Moreover, since the bonding strength is improved due to interdiffusion in the metallic chromium thin film forming area, interfacial peeling and the like do not occur even in response to thermal stress.
したかって、信頼性の高い疑似ギャップ効果のない高品
質な磁気ヘッドが提供出来る。Therefore, it is possible to provide a highly reliable, high-quality magnetic head free of pseudo-gap effects.
第1図は、本発明の第1の実施例による磁気ヘッドコア
チップのギャップ近傍要部の拡大図、第2図は該実施例
の磁気ヘッドコアブロックの斜視図、
第3図は、該実施例の非磁性酸化物、金属クロム薄膜形
成状態を示す要部の斜視図、
第4図は該実施例の高磁気飽和金属薄膜、ギャップスペ
ーサ形成状態を示す要部の斜視図、第5図は、本発明の
他の実施例を示す斜視図、第6図は従来例の磁気へラド
ギャップ近傍要部の拡大部である。
1.2・・・強磁性金属酸化物コア(フェライト)、3
・・・巻線係止溝、
4・・・巻線窓溝、 5・・・ガラス溝、6・・・トラ
ック溝、
7・・・非磁性酸化物薄膜(Ae203)、8・・・金
属クロム薄膜、FIG. 1 is an enlarged view of a main part near the gap of a magnetic head core chip according to a first embodiment of the present invention, FIG. 2 is a perspective view of a magnetic head core block of the embodiment, and FIG. 3 is a perspective view of the magnetic head core block of the embodiment. FIG. 4 is a perspective view of the main part showing the state of non-magnetic oxide and metal chromium thin film formed in this example. FIG. FIG. 6, which is a perspective view showing another embodiment of the present invention, is an enlarged view of the main part near the magnetic held gap of the conventional example. 1.2...Ferromagnetic metal oxide core (ferrite), 3
...Winding locking groove, 4...Winding window groove, 5...Glass groove, 6...Track groove, 7...Nonmagnetic oxide thin film (Ae203), 8...Metal chrome thin film,
Claims (2)
気ギャップ形成面に高飽和磁束密度を有する金属薄膜を
形成した磁気ヘッドにおいて、金属酸化物強磁性体と高
飽和磁束密度を有する金属薄膜との間の一部に非磁性酸
化物薄膜を形成し、かつ残部に金属クロムの薄膜を形成
した事を特徴とした磁気ヘッド。(1) In a magnetic head in which a metal thin film having a high saturation magnetic flux density is formed on at least one magnetic gap forming surface of a pair of metal oxide ferromagnetic materials, the metal oxide ferromagnetic material and a metal thin film having a high saturation magnetic flux density are formed. A magnetic head characterized in that a non-magnetic oxide thin film is formed in a part between the two and a thin metal chromium film is formed in the remaining part.
いて、トラック巾方向に非磁性酸化物薄膜、金属クロム
薄膜を交互にストライプ状に形成することを特徴とした
当該磁気ヘッド。(2) A magnetic head according to claim 1, characterized in that nonmagnetic oxide thin films and metal chromium thin films are alternately formed in stripes in the track width direction.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20910488A JPH0258711A (en) | 1988-08-23 | 1988-08-23 | Magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20910488A JPH0258711A (en) | 1988-08-23 | 1988-08-23 | Magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0258711A true JPH0258711A (en) | 1990-02-27 |
Family
ID=16567355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20910488A Pending JPH0258711A (en) | 1988-08-23 | 1988-08-23 | Magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0258711A (en) |
-
1988
- 1988-08-23 JP JP20910488A patent/JPH0258711A/en active Pending
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