JPH0257096U - - Google Patents

Info

Publication number
JPH0257096U
JPH0257096U JP13657588U JP13657588U JPH0257096U JP H0257096 U JPH0257096 U JP H0257096U JP 13657588 U JP13657588 U JP 13657588U JP 13657588 U JP13657588 U JP 13657588U JP H0257096 U JPH0257096 U JP H0257096U
Authority
JP
Japan
Prior art keywords
sample stage
drive mechanism
rotating sample
rotating
rotational drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13657588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13657588U priority Critical patent/JPH0257096U/ja
Publication of JPH0257096U publication Critical patent/JPH0257096U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP13657588U 1988-10-19 1988-10-19 Pending JPH0257096U (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13657588U JPH0257096U (pm) 1988-10-19 1988-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13657588U JPH0257096U (pm) 1988-10-19 1988-10-19

Publications (1)

Publication Number Publication Date
JPH0257096U true JPH0257096U (pm) 1990-04-25

Family

ID=31397214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13657588U Pending JPH0257096U (pm) 1988-10-19 1988-10-19

Country Status (1)

Country Link
JP (1) JPH0257096U (pm)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0279495U (pm) * 1988-12-05 1990-06-19
JP2002300766A (ja) * 2001-03-30 2002-10-11 Hitachi Metals Ltd 揺動モータおよびステージ装置
JP2004072960A (ja) * 2002-08-09 2004-03-04 Nippon Thompson Co Ltd リニアモータを内蔵したアライメントステージ装置
JP2004112864A (ja) * 2002-09-13 2004-04-08 Nippon Thompson Co Ltd リニアモータを内蔵したｘｙステージ装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333603A (en) * 1976-09-10 1978-03-29 Hitachi Ltd Turntable
JPS61168853A (ja) * 1985-01-23 1986-07-30 Hitachi Ltd 検査装置
JPS63271191A (ja) * 1987-04-28 1988-11-09 三菱電機株式会社 三点支持ステ−ジ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333603A (en) * 1976-09-10 1978-03-29 Hitachi Ltd Turntable
JPS61168853A (ja) * 1985-01-23 1986-07-30 Hitachi Ltd 検査装置
JPS63271191A (ja) * 1987-04-28 1988-11-09 三菱電機株式会社 三点支持ステ−ジ装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0279495U (pm) * 1988-12-05 1990-06-19
JP2002300766A (ja) * 2001-03-30 2002-10-11 Hitachi Metals Ltd 揺動モータおよびステージ装置
JP2004072960A (ja) * 2002-08-09 2004-03-04 Nippon Thompson Co Ltd リニアモータを内蔵したアライメントステージ装置
JP2004112864A (ja) * 2002-09-13 2004-04-08 Nippon Thompson Co Ltd リニアモータを内蔵したｘｙステージ装置

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