JPH0257096U - - Google Patents
Info
- Publication number
- JPH0257096U JPH0257096U JP13657588U JP13657588U JPH0257096U JP H0257096 U JPH0257096 U JP H0257096U JP 13657588 U JP13657588 U JP 13657588U JP 13657588 U JP13657588 U JP 13657588U JP H0257096 U JPH0257096 U JP H0257096U
- Authority
- JP
- Japan
- Prior art keywords
- sample stage
- drive mechanism
- rotating sample
- rotating
- rotational drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000007689 inspection Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13657588U JPH0257096U (en, 2012) | 1988-10-19 | 1988-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13657588U JPH0257096U (en, 2012) | 1988-10-19 | 1988-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0257096U true JPH0257096U (en, 2012) | 1990-04-25 |
Family
ID=31397214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13657588U Pending JPH0257096U (en, 2012) | 1988-10-19 | 1988-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0257096U (en, 2012) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0279495U (en, 2012) * | 1988-12-05 | 1990-06-19 | ||
| JP2002300766A (ja) * | 2001-03-30 | 2002-10-11 | Hitachi Metals Ltd | 揺動モータおよびステージ装置 |
| JP2004072960A (ja) * | 2002-08-09 | 2004-03-04 | Nippon Thompson Co Ltd | リニアモータを内蔵したアライメントステージ装置 |
| JP2004112864A (ja) * | 2002-09-13 | 2004-04-08 | Nippon Thompson Co Ltd | リニアモータを内蔵したｘｙステージ装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5333603A (en) * | 1976-09-10 | 1978-03-29 | Hitachi Ltd | Turntable |
| JPS61168853A (ja) * | 1985-01-23 | 1986-07-30 | Hitachi Ltd | 検査装置 |
| JPS63271191A (ja) * | 1987-04-28 | 1988-11-09 | 三菱電機株式会社 | 三点支持ステ−ジ装置 |
-
1988
- 1988-10-19 JP JP13657588U patent/JPH0257096U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5333603A (en) * | 1976-09-10 | 1978-03-29 | Hitachi Ltd | Turntable |
| JPS61168853A (ja) * | 1985-01-23 | 1986-07-30 | Hitachi Ltd | 検査装置 |
| JPS63271191A (ja) * | 1987-04-28 | 1988-11-09 | 三菱電機株式会社 | 三点支持ステ−ジ装置 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0279495U (en, 2012) * | 1988-12-05 | 1990-06-19 | ||
| JP2002300766A (ja) * | 2001-03-30 | 2002-10-11 | Hitachi Metals Ltd | 揺動モータおよびステージ装置 |
| JP2004072960A (ja) * | 2002-08-09 | 2004-03-04 | Nippon Thompson Co Ltd | リニアモータを内蔵したアライメントステージ装置 |
| JP2004112864A (ja) * | 2002-09-13 | 2004-04-08 | Nippon Thompson Co Ltd | リニアモータを内蔵したｘｙステージ装置 |