JPH0257027U - - Google Patents
Info
- Publication number
- JPH0257027U JPH0257027U JP13504688U JP13504688U JPH0257027U JP H0257027 U JPH0257027 U JP H0257027U JP 13504688 U JP13504688 U JP 13504688U JP 13504688 U JP13504688 U JP 13504688U JP H0257027 U JPH0257027 U JP H0257027U
- Authority
- JP
- Japan
- Prior art keywords
- flow sensor
- semiconductor base
- temperature
- microbridge
- measuring resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13504688U JPH0612493Y2 (ja) | 1988-10-18 | 1988-10-18 | マイクロブリッジフローセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13504688U JPH0612493Y2 (ja) | 1988-10-18 | 1988-10-18 | マイクロブリッジフローセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0257027U true JPH0257027U (uk) | 1990-04-25 |
| JPH0612493Y2 JPH0612493Y2 (ja) | 1994-03-30 |
Family
ID=31394334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13504688U Expired - Lifetime JPH0612493Y2 (ja) | 1988-10-18 | 1988-10-18 | マイクロブリッジフローセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612493Y2 (uk) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004361271A (ja) * | 2003-06-05 | 2004-12-24 | Hitachi Ltd | 熱式空気流量計 |
| JP2006017724A (ja) * | 2004-06-30 | 2006-01-19 | Codman & Shurtleff Inc | 非対称デザインを有する熱式流量センサ |
| JP2017044637A (ja) * | 2015-08-28 | 2017-03-02 | 株式会社デンソー | 流量センサ |
-
1988
- 1988-10-18 JP JP13504688U patent/JPH0612493Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004361271A (ja) * | 2003-06-05 | 2004-12-24 | Hitachi Ltd | 熱式空気流量計 |
| JP2006017724A (ja) * | 2004-06-30 | 2006-01-19 | Codman & Shurtleff Inc | 非対称デザインを有する熱式流量センサ |
| JP2017044637A (ja) * | 2015-08-28 | 2017-03-02 | 株式会社デンソー | 流量センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0612493Y2 (ja) | 1994-03-30 |