JPH0256619B2 - - Google Patents
Info
- Publication number
- JPH0256619B2 JPH0256619B2 JP57180726A JP18072682A JPH0256619B2 JP H0256619 B2 JPH0256619 B2 JP H0256619B2 JP 57180726 A JP57180726 A JP 57180726A JP 18072682 A JP18072682 A JP 18072682A JP H0256619 B2 JPH0256619 B2 JP H0256619B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- vibrator
- bending
- bonded
- slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005452 bending Methods 0.000 claims description 18
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000010287 polarization Effects 0.000 claims 1
- 101700004678 SLIT3 Proteins 0.000 description 5
- 102100027339 Slit homolog 3 protein Human genes 0.000 description 5
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H13/00—Measuring resonant frequency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57180726A JPS5970923A (ja) | 1982-10-14 | 1982-10-14 | 振動センサ |
EP83107244A EP0100501B1 (fr) | 1982-07-28 | 1983-07-23 | Détecteur de vibrations |
DE8383107244T DE3379175D1 (en) | 1982-07-28 | 1983-07-23 | Vibration sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57180726A JPS5970923A (ja) | 1982-10-14 | 1982-10-14 | 振動センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5970923A JPS5970923A (ja) | 1984-04-21 |
JPH0256619B2 true JPH0256619B2 (fr) | 1990-11-30 |
Family
ID=16088227
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57180726A Granted JPS5970923A (ja) | 1982-07-28 | 1982-10-14 | 振動センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5970923A (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS618630A (ja) * | 1984-06-22 | 1986-01-16 | Matsushita Electric Ind Co Ltd | 振動センサ |
US5003824A (en) * | 1989-12-26 | 1991-04-02 | Matsushita Electric Industrial Co., Ltd. | Vibration/acceleration sensor |
US6111338A (en) * | 1993-05-28 | 2000-08-29 | Matsushita Electric Industrial Co., Ltd. | Acceleration sensor and method for producing the same |
-
1982
- 1982-10-14 JP JP57180726A patent/JPS5970923A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5970923A (ja) | 1984-04-21 |
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