JPH0256557U - - Google Patents
Info
- Publication number
- JPH0256557U JPH0256557U JP13432388U JP13432388U JPH0256557U JP H0256557 U JPH0256557 U JP H0256557U JP 13432388 U JP13432388 U JP 13432388U JP 13432388 U JP13432388 U JP 13432388U JP H0256557 U JPH0256557 U JP H0256557U
- Authority
- JP
- Japan
- Prior art keywords
- blade
- uneven groove
- grooving
- holding structure
- cutting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 229910000859 α-Fe Inorganic materials 0.000 claims 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Description
第１図は本考案に係る外周刃ブレードの保持構
造の断面図、第２図ａ及びｂは第１図のＡ―Ａ線
に沿つた外周刃ブレードの保持前と保持後を示す
矢視図、第３図は第１図のＢ―Ｂ線に沿う矢視図
、第４図ａ及びｂは他の実施例を示す第１図のＡ
―Ａ線に沿つた外周刃ブレードの保持前と保持後
を示す矢視図である。
１０…テーパブロツク、１２，１４…ハブフラ
ンジ、１２Ａ，１４Ａ…凹凸溝部、１６…スピン
ドル端部、１８…外周刃ブレード、２０…締め付
けナツト、２２…固定ナツト、２４Ａ…凹凸溝部
。
Fig. 1 is a cross-sectional view of the peripheral blade holding structure according to the present invention, and Fig. 2 a and b are arrow views showing the peripheral blade before and after holding the peripheral blade along line A-A in Fig. 1. , FIG. 3 is a view taken along the line BB in FIG. 1, and FIGS. 4 a and b are views A in FIG.
- It is an arrow view showing the peripheral edge blade before and after holding along line A. DESCRIPTION OF SYMBOLS 10... Taper block, 12, 14... Hub flange, 12A, 14A... Uneven groove part, 16... Spindle end, 18... Peripheral blade, 20... Tightening nut, 22... Fixing nut, 24A... Uneven groove part.
Claims (1)
外周刃ブレードによつてシリコンウエハ、フエラ
イトコア等の脆性材料に切断加工及び溝入れ加工
を施す装置において、 前記フランジの少なくとも一方の外周刃ブレー
ド当接面に放射方向の凹凸溝を形成したことを特
徴とする外周波ブレードの保持構造。[Scope of Claim for Utility Model Registration] An apparatus for cutting and grooving brittle materials such as silicon wafers and ferrite cores using a peripheral blade held between a pair of flanges fixed to a rotating shaft, comprising: A holding structure for an outer frequency blade, characterized in that a radially uneven groove is formed on at least one outer circumferential blade contact surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13432388U JPH0256557U (en) | 1988-10-14 | 1988-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13432388U JPH0256557U (en) | 1988-10-14 | 1988-10-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0256557U true JPH0256557U (en) | 1990-04-24 |
Family
ID=31392978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13432388U Pending JPH0256557U (en) | 1988-10-14 | 1988-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0256557U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0497647U (en) * | 1991-01-22 | 1992-08-24 | ||
| TWI789496B (en) * | 2018-03-01 | 2023-01-11 | 日商迪思科股份有限公司 | flange mechanism |
-
1988
- 1988-10-14 JP JP13432388U patent/JPH0256557U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0497647U (en) * | 1991-01-22 | 1992-08-24 | ||
| TWI789496B (en) * | 2018-03-01 | 2023-01-11 | 日商迪思科股份有限公司 | flange mechanism |