JPH0256441U - - Google Patents

Info

Publication number
JPH0256441U
JPH0256441U JP13596688U JP13596688U JPH0256441U JP H0256441 U JPH0256441 U JP H0256441U JP 13596688 U JP13596688 U JP 13596688U JP 13596688 U JP13596688 U JP 13596688U JP H0256441 U JPH0256441 U JP H0256441U
Authority
JP
Japan
Prior art keywords
plate
substrate
processed
contact
elevating drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13596688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0731546Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13596688U priority Critical patent/JPH0731546Y2/ja
Publication of JPH0256441U publication Critical patent/JPH0256441U/ja
Application granted granted Critical
Publication of JPH0731546Y2 publication Critical patent/JPH0731546Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Drying Of Semiconductors (AREA)
JP13596688U 1988-10-18 1988-10-18 基板用表面処理装置 Expired - Fee Related JPH0731546Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13596688U JPH0731546Y2 (ja) 1988-10-18 1988-10-18 基板用表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13596688U JPH0731546Y2 (ja) 1988-10-18 1988-10-18 基板用表面処理装置

Publications (2)

Publication Number Publication Date
JPH0256441U true JPH0256441U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-04-24
JPH0731546Y2 JPH0731546Y2 (ja) 1995-07-19

Family

ID=31396039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13596688U Expired - Fee Related JPH0731546Y2 (ja) 1988-10-18 1988-10-18 基板用表面処理装置

Country Status (1)

Country Link
JP (1) JPH0731546Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004325158A (ja) * 2003-04-23 2004-11-18 Ushio Inc 接合方法
JP2006210767A (ja) * 2005-01-31 2006-08-10 Dainippon Screen Mfg Co Ltd 基板処理装置
CN113736975A (zh) * 2021-09-22 2021-12-03 湖南城市学院 一种铝合金加工固溶热处理炉及固溶方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004325158A (ja) * 2003-04-23 2004-11-18 Ushio Inc 接合方法
JP2006210767A (ja) * 2005-01-31 2006-08-10 Dainippon Screen Mfg Co Ltd 基板処理装置
CN113736975A (zh) * 2021-09-22 2021-12-03 湖南城市学院 一种铝合金加工固溶热处理炉及固溶方法
CN113736975B (zh) * 2021-09-22 2023-02-28 湖南城市学院 一种铝合金加工固溶热处理炉及固溶方法

Also Published As

Publication number Publication date
JPH0731546Y2 (ja) 1995-07-19

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees