JPH0256434U - - Google Patents
Info
- Publication number
- JPH0256434U JPH0256434U JP13582488U JP13582488U JPH0256434U JP H0256434 U JPH0256434 U JP H0256434U JP 13582488 U JP13582488 U JP 13582488U JP 13582488 U JP13582488 U JP 13582488U JP H0256434 U JPH0256434 U JP H0256434U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- holds
- incorporated
- thermocouple
- type semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13582488U JPH0256434U (nl) | 1988-10-18 | 1988-10-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13582488U JPH0256434U (nl) | 1988-10-18 | 1988-10-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0256434U true JPH0256434U (nl) | 1990-04-24 |
Family
ID=31395769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13582488U Pending JPH0256434U (nl) | 1988-10-18 | 1988-10-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0256434U (nl) |
-
1988
- 1988-10-18 JP JP13582488U patent/JPH0256434U/ja active Pending