JPS633143U - - Google Patents
Info
- Publication number
- JPS633143U JPS633143U JP9701186U JP9701186U JPS633143U JP S633143 U JPS633143 U JP S633143U JP 9701186 U JP9701186 U JP 9701186U JP 9701186 U JP9701186 U JP 9701186U JP S633143 U JPS633143 U JP S633143U
- Authority
- JP
- Japan
- Prior art keywords
- transfer section
- section
- semiconductor manufacturing
- gas
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9701186U JPS633143U (nl) | 1986-06-24 | 1986-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9701186U JPS633143U (nl) | 1986-06-24 | 1986-06-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS633143U true JPS633143U (nl) | 1988-01-11 |
Family
ID=30963476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9701186U Pending JPS633143U (nl) | 1986-06-24 | 1986-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS633143U (nl) |
-
1986
- 1986-06-24 JP JP9701186U patent/JPS633143U/ja active Pending