JPS6393642U - - Google Patents
Info
- Publication number
- JPS6393642U JPS6393642U JP18823986U JP18823986U JPS6393642U JP S6393642 U JPS6393642 U JP S6393642U JP 18823986 U JP18823986 U JP 18823986U JP 18823986 U JP18823986 U JP 18823986U JP S6393642 U JPS6393642 U JP S6393642U
- Authority
- JP
- Japan
- Prior art keywords
- insulating
- heating
- semiconductor wafer
- stand
- cooling device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18823986U JPS6393642U (nl) | 1986-12-05 | 1986-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18823986U JPS6393642U (nl) | 1986-12-05 | 1986-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6393642U true JPS6393642U (nl) | 1988-06-17 |
Family
ID=31139417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18823986U Pending JPS6393642U (nl) | 1986-12-05 | 1986-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6393642U (nl) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH029546A (ja) * | 1988-06-29 | 1990-01-12 | Tokuda Seisakusho Ltd | 静電チャック |
| JPH11354527A (ja) * | 1998-06-10 | 1999-12-24 | Sukegawa Electric Co Ltd | 板体加熱装置 |
| JP2014090167A (ja) * | 2012-10-11 | 2014-05-15 | Lam Research Corporation | 剥離乾燥装置及び方法 |
-
1986
- 1986-12-05 JP JP18823986U patent/JPS6393642U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH029546A (ja) * | 1988-06-29 | 1990-01-12 | Tokuda Seisakusho Ltd | 静電チャック |
| JPH11354527A (ja) * | 1998-06-10 | 1999-12-24 | Sukegawa Electric Co Ltd | 板体加熱装置 |
| JP2014090167A (ja) * | 2012-10-11 | 2014-05-15 | Lam Research Corporation | 剥離乾燥装置及び方法 |