JPH0253964U - - Google Patents

Info

Publication number

JPH0253964U

JPH0253964U JP12514488U JP12514488U JPH0253964U JP H0253964 U JPH0253964 U JP H0253964U JP 12514488 U JP12514488 U JP 12514488U JP 12514488 U JP12514488 U JP 12514488U JP H0253964 U JPH0253964 U JP H0253964U

Authority

JP

Japan

Prior art keywords

disk

chamber

rotary table

vapor deposition

holder

Prior art date

1988-09-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000007740 vapor deposition Methods 0.000 claims description 13
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
• 238000001816 cooling Methods 0.000 claims description 2
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
• 230000008021 deposition Effects 0.000 claims 2
• 238000004140 cleaning Methods 0.000 claims 1
• 239000011810 insulating material Substances 0.000 description 2
• 239000000463 material Substances 0.000 description 2
• 239000004809 Teflon Substances 0.000 description 1
• 229920006362 Teflon® Polymers 0.000 description 1
• 238000009792 diffusion process Methods 0.000 description 1
• 238000005192 partition Methods 0.000 description 1
• 239000003566 sealing material Substances 0.000 description 1