JPH0252438U - - Google Patents
Info
- Publication number
- JPH0252438U JPH0252438U JP13114388U JP13114388U JPH0252438U JP H0252438 U JPH0252438 U JP H0252438U JP 13114388 U JP13114388 U JP 13114388U JP 13114388 U JP13114388 U JP 13114388U JP H0252438 U JPH0252438 U JP H0252438U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- drying chamber
- drying
- wall
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims 2
- 230000008016 vaporization Effects 0.000 claims 1
- 238000004080 punching Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13114388U JPH0252438U (el) | 1988-10-05 | 1988-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13114388U JPH0252438U (el) | 1988-10-05 | 1988-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252438U true JPH0252438U (el) | 1990-04-16 |
Family
ID=31386934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13114388U Pending JPH0252438U (el) | 1988-10-05 | 1988-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252438U (el) |
-
1988
- 1988-10-05 JP JP13114388U patent/JPH0252438U/ja active Pending