JPH0252428U - - Google Patents

Info

Publication number
JPH0252428U
JPH0252428U JP13221588U JP13221588U JPH0252428U JP H0252428 U JPH0252428 U JP H0252428U JP 13221588 U JP13221588 U JP 13221588U JP 13221588 U JP13221588 U JP 13221588U JP H0252428 U JPH0252428 U JP H0252428U
Authority
JP
Japan
Prior art keywords
light
optical axis
exposure
diffuser plate
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13221588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13221588U priority Critical patent/JPH0252428U/ja
Publication of JPH0252428U publication Critical patent/JPH0252428U/ja
Pending legal-status Critical Current

Links

JP13221588U 1988-10-07 1988-10-07 Pending JPH0252428U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13221588U JPH0252428U (US20100056889A1-20100304-C00004.png) 1988-10-07 1988-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13221588U JPH0252428U (US20100056889A1-20100304-C00004.png) 1988-10-07 1988-10-07

Publications (1)

Publication Number Publication Date
JPH0252428U true JPH0252428U (US20100056889A1-20100304-C00004.png) 1990-04-16

Family

ID=31388973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13221588U Pending JPH0252428U (US20100056889A1-20100304-C00004.png) 1988-10-07 1988-10-07

Country Status (1)

Country Link
JP (1) JPH0252428U (US20100056889A1-20100304-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012238657A (ja) * 2011-05-10 2012-12-06 Dainippon Printing Co Ltd 露光装置及び露光用光学装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012238657A (ja) * 2011-05-10 2012-12-06 Dainippon Printing Co Ltd 露光装置及び露光用光学装置

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