JPH0252257U - - Google Patents

Info

Publication number
JPH0252257U
JPH0252257U JP13157688U JP13157688U JPH0252257U JP H0252257 U JPH0252257 U JP H0252257U JP 13157688 U JP13157688 U JP 13157688U JP 13157688 U JP13157688 U JP 13157688U JP H0252257 U JPH0252257 U JP H0252257U
Authority
JP
Japan
Prior art keywords
analysis
magnetic flux
flux density
analysis electromagnet
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13157688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648738Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13157688U priority Critical patent/JPH0648738Y2/ja
Publication of JPH0252257U publication Critical patent/JPH0252257U/ja
Application granted granted Critical
Publication of JPH0648738Y2 publication Critical patent/JPH0648738Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP13157688U 1988-10-06 1988-10-06 イオン注入装置 Expired - Lifetime JPH0648738Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13157688U JPH0648738Y2 (ja) 1988-10-06 1988-10-06 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13157688U JPH0648738Y2 (ja) 1988-10-06 1988-10-06 イオン注入装置

Publications (2)

Publication Number Publication Date
JPH0252257U true JPH0252257U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-04-16
JPH0648738Y2 JPH0648738Y2 (ja) 1994-12-12

Family

ID=31387777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13157688U Expired - Lifetime JPH0648738Y2 (ja) 1988-10-06 1988-10-06 イオン注入装置

Country Status (1)

Country Link
JP (1) JPH0648738Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0648738Y2 (ja) 1994-12-12

Similar Documents

Publication Publication Date Title
US4754200A (en) Systems and methods for ion source control in ion implanters
JP2005500662A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE10012964A1 (de) Vorrichtung und Verfahren zum Betreiben eines wiederaufladbaren Speichers für elektrische Energie
JPH0724209B2 (ja) イオン注入装置
JPH0252257U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
SE9802768D0 (sv) Method and arrangement for controlling a current
WO2003065540A3 (en) Charging circuit
WO2002099446B1 (en) Method and apparatus for controlling a magnetically actuated power switching device
JP3213399B2 (ja) 充電方法
JPS57130358A (en) Full automatic ion implantation device
JPS5594501A (en) Magnetic float control device
JPH07169433A (ja) イオン注入装置
JP2740663B2 (ja) イオン注入装置
KR910019134A (ko) 이온주입장치
Huang et al. Simulation study of the RF gun for the TTF free electron laser
JP2001035436A (ja) イオントラップ形質量分析装置及びその制御方法
JPS61104960U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63109438U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0775159B2 (ja) イオン注入装置
JPH0342617Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61193351A (ja) 帯電防止制御装置
JPH0250952U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0357551U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
SU817621A1 (ru) Устройство дл испытани управ-л ЕМыХ ВЕНТилЕй
JPS62188145U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)