JPH0252149U - - Google Patents

Info

Publication number
JPH0252149U
JPH0252149U JP13058388U JP13058388U JPH0252149U JP H0252149 U JPH0252149 U JP H0252149U JP 13058388 U JP13058388 U JP 13058388U JP 13058388 U JP13058388 U JP 13058388U JP H0252149 U JPH0252149 U JP H0252149U
Authority
JP
Japan
Prior art keywords
light
detector
defect detector
inspection area
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13058388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13058388U priority Critical patent/JPH0252149U/ja
Publication of JPH0252149U publication Critical patent/JPH0252149U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP13058388U 1988-10-05 1988-10-05 Pending JPH0252149U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13058388U JPH0252149U (US06815460-20041109-C00097.png) 1988-10-05 1988-10-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13058388U JPH0252149U (US06815460-20041109-C00097.png) 1988-10-05 1988-10-05

Publications (1)

Publication Number Publication Date
JPH0252149U true JPH0252149U (US06815460-20041109-C00097.png) 1990-04-13

Family

ID=31385883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13058388U Pending JPH0252149U (US06815460-20041109-C00097.png) 1988-10-05 1988-10-05

Country Status (1)

Country Link
JP (1) JPH0252149U (US06815460-20041109-C00097.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009512839A (ja) * 2005-10-21 2009-03-26 イスラ ヴィズィオーン アーゲー ガラス板光学検査システム及び方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009512839A (ja) * 2005-10-21 2009-03-26 イスラ ヴィズィオーン アーゲー ガラス板光学検査システム及び方法

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