JPH0251261U - - Google Patents
Info
- Publication number
- JPH0251261U JPH0251261U JP12896988U JP12896988U JPH0251261U JP H0251261 U JPH0251261 U JP H0251261U JP 12896988 U JP12896988 U JP 12896988U JP 12896988 U JP12896988 U JP 12896988U JP H0251261 U JPH0251261 U JP H0251261U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- ejection hole
- cvd
- reaction
- gas ejection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 14
- 239000012495 reaction gas Substances 0.000 claims 2
- 239000012265 solid product Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12896988U JPH0437901Y2 (zh) | 1988-09-30 | 1988-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12896988U JPH0437901Y2 (zh) | 1988-09-30 | 1988-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0251261U true JPH0251261U (zh) | 1990-04-10 |
| JPH0437901Y2 JPH0437901Y2 (zh) | 1992-09-04 |
Family
ID=31382803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12896988U Expired JPH0437901Y2 (zh) | 1988-09-30 | 1988-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437901Y2 (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012253134A (ja) * | 2011-06-01 | 2012-12-20 | Hitachi Kokusai Electric Inc | 基板処理装置 |
-
1988
- 1988-09-30 JP JP12896988U patent/JPH0437901Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012253134A (ja) * | 2011-06-01 | 2012-12-20 | Hitachi Kokusai Electric Inc | 基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437901Y2 (zh) | 1992-09-04 |