JPH0251261U - - Google Patents

Info

Publication number
JPH0251261U
JPH0251261U JP12896988U JP12896988U JPH0251261U JP H0251261 U JPH0251261 U JP H0251261U JP 12896988 U JP12896988 U JP 12896988U JP 12896988 U JP12896988 U JP 12896988U JP H0251261 U JPH0251261 U JP H0251261U
Authority
JP
Japan
Prior art keywords
gas
ejection hole
cvd
reaction
gas ejection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12896988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0437901Y2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12896988U priority Critical patent/JPH0437901Y2/ja
Publication of JPH0251261U publication Critical patent/JPH0251261U/ja
Application granted granted Critical
Publication of JPH0437901Y2 publication Critical patent/JPH0437901Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP12896988U 1988-09-30 1988-09-30 Expired JPH0437901Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12896988U JPH0437901Y2 (cg-RX-API-DMAC10.html) 1988-09-30 1988-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12896988U JPH0437901Y2 (cg-RX-API-DMAC10.html) 1988-09-30 1988-09-30

Publications (2)

Publication Number Publication Date
JPH0251261U true JPH0251261U (cg-RX-API-DMAC10.html) 1990-04-10
JPH0437901Y2 JPH0437901Y2 (cg-RX-API-DMAC10.html) 1992-09-04

Family

ID=31382803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12896988U Expired JPH0437901Y2 (cg-RX-API-DMAC10.html) 1988-09-30 1988-09-30

Country Status (1)

Country Link
JP (1) JPH0437901Y2 (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012253134A (ja) * 2011-06-01 2012-12-20 Hitachi Kokusai Electric Inc 基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012253134A (ja) * 2011-06-01 2012-12-20 Hitachi Kokusai Electric Inc 基板処理装置

Also Published As

Publication number Publication date
JPH0437901Y2 (cg-RX-API-DMAC10.html) 1992-09-04

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