JPH025107Y2 - - Google Patents
Info
- Publication number
- JPH025107Y2 JPH025107Y2 JP14308285U JP14308285U JPH025107Y2 JP H025107 Y2 JPH025107 Y2 JP H025107Y2 JP 14308285 U JP14308285 U JP 14308285U JP 14308285 U JP14308285 U JP 14308285U JP H025107 Y2 JPH025107 Y2 JP H025107Y2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- valve
- stage
- pressure
- pumps
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 12
- 238000006073 displacement reaction Methods 0.000 description 12
- 238000005086 pumping Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14308285U JPH025107Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-09-19 | 1985-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14308285U JPH025107Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-09-19 | 1985-09-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6252291U JPS6252291U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-04-01 |
| JPH025107Y2 true JPH025107Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-02-07 |
Family
ID=31052424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14308285U Expired JPH025107Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-09-19 | 1985-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH025107Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009174822A (ja) * | 2008-01-28 | 2009-08-06 | Panasonic Corp | 流体加熱装置 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010033373A1 (de) * | 2010-08-04 | 2012-02-09 | Inficon Gmbh | Lecksuchgerät |
| JP5776767B2 (ja) * | 2011-04-11 | 2015-09-09 | 株式会社村田製作所 | 流体制御装置およびポンプ接続方法 |
| WO2013084909A1 (ja) * | 2011-12-09 | 2013-06-13 | 株式会社村田製作所 | 気体制御装置 |
| JP6078749B2 (ja) * | 2013-11-26 | 2017-02-15 | オリオン機械株式会社 | 吸引システム |
-
1985
- 1985-09-19 JP JP14308285U patent/JPH025107Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009174822A (ja) * | 2008-01-28 | 2009-08-06 | Panasonic Corp | 流体加熱装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6252291U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-04-01 |