JPH0250650U - - Google Patents
Info
- Publication number
- JPH0250650U JPH0250650U JP12912288U JP12912288U JPH0250650U JP H0250650 U JPH0250650 U JP H0250650U JP 12912288 U JP12912288 U JP 12912288U JP 12912288 U JP12912288 U JP 12912288U JP H0250650 U JPH0250650 U JP H0250650U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- pressure
- chamber
- vacuum chamber
- reference vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 150000002484 inorganic compounds Chemical class 0.000 claims description 2
- 229910010272 inorganic material Inorganic materials 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- 229920002545 silicone oil Polymers 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12912288U JPH0250650U (de) | 1988-09-30 | 1988-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12912288U JPH0250650U (de) | 1988-09-30 | 1988-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0250650U true JPH0250650U (de) | 1990-04-09 |
Family
ID=31383105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12912288U Pending JPH0250650U (de) | 1988-09-30 | 1988-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0250650U (de) |
-
1988
- 1988-09-30 JP JP12912288U patent/JPH0250650U/ja active Pending
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