JPH0250636B2 - - Google Patents

Info

Publication number
JPH0250636B2
JPH0250636B2 JP61170557A JP17055786A JPH0250636B2 JP H0250636 B2 JPH0250636 B2 JP H0250636B2 JP 61170557 A JP61170557 A JP 61170557A JP 17055786 A JP17055786 A JP 17055786A JP H0250636 B2 JPH0250636 B2 JP H0250636B2
Authority
JP
Japan
Prior art keywords
copper
acid
resist film
clad laminate
aqueous solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61170557A
Other languages
Japanese (ja)
Other versions
JPS6327091A (en
Inventor
Masashi Kinoshita
Hajime Hata
Kazuo Kamagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shikoku Chemicals Corp
Original Assignee
Shikoku Chemicals Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shikoku Chemicals Corp filed Critical Shikoku Chemicals Corp
Priority to JP17055786A priority Critical patent/JPS6327091A/en
Publication of JPS6327091A publication Critical patent/JPS6327091A/en
Publication of JPH0250636B2 publication Critical patent/JPH0250636B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0094Filling or covering plated through-holes or blind plated vias, e.g. for masking or for mechanical reinforcement
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061Etching masks
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections
    • H05K3/425Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern
    • H05K3/427Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern initial plating of through-holes in metal-clad substrates

Landscapes

  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、銅スルーホールプリント配線板の製
造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a copper through-hole printed wiring board.

従来の技術 銅スルーホールプリント配線板の製造方法とし
て、従来穴埋法、テンテイング法及び半田剥離法
が行われて来たが、これらの方法では生産性が
低い、エツチングレジスト膜の信頼性に劣り製
品不良が発生し易い、あるいは製造コストが高
い等の欠点を有していた。
Conventional technology The hole-filling method, tenting method, and solder stripping method have traditionally been used as methods for manufacturing copper through-hole printed wiring boards, but these methods have low productivity and poor reliability of the etching resist film. This method has drawbacks such as easy product defects and high manufacturing costs.

これらの欠点を解消するために、本件特許出願
人は既にアルキルイミダゾール化合物の銅錯体か
らなる膜をアルカリエツチングレジストとして使
用する方法を提案した。(特開昭61−90492号公
報) この発明は、両面銅張積層板の必要箇所に穴を
あけ、次いで無電解銅メツキを行い、更に電解銅
メツキを行つた後、該積層板上の最終的にアルカ
リ性エツチング液にて除去されるべき回路以外の
部分に、アルカリ性水溶液に可溶な陰画のレジス
ト膜〔A〕を印刷法もしくは写真法によつて形成
し、次にこのように処理された積層板を下記一般
式で示されるアルキルイミダゾール化合物の塩 一般式 〔但し、式中R2は長鎖アルキル基、R4は水素原
子又は低級アルキル基、HAは有機又は無機の酸
を示す〕 の水溶液に浸漬したのち、乾燥することによつ
て、スルーホールを含む回路部分(即ち前記陰画
のレジスト膜〔A〕で覆われていない部分)の銅
表面に前記アルキルイミダゾール化合物の銅錯体
からなるエツチングレジスト膜〔B〕を形成さ
せ、次いでアルカリ水溶液に浸漬させて前記アル
カリに可溶性のレジスト膜〔A〕を溶解除去し
て、陰画部の銅面を露出させ、次いでアルカリ性
エツチング液で処理して(この場合エツチングレ
ジスト膜〔B〕で覆われた部分は変化をうけな
い)、目的とする銅スルーホールプリント配線板
を製造する方法である。
In order to eliminate these drawbacks, the applicant of the present patent has already proposed a method of using a film made of a copper complex of an alkylimidazole compound as an alkaline etching resist. (Japanese Unexamined Patent Application Publication No. 61-90492) This invention involves drilling holes at necessary locations in a double-sided copper-clad laminate, then performing electroless copper plating, and then performing electrolytic copper plating. A negative resist film [A] soluble in an alkaline aqueous solution was formed by a printing method or a photographic method on parts other than the circuit to be removed with an alkaline etching solution, and then treated in this way. The laminate is a salt of an alkylimidazole compound represented by the following general formula. [However, in the formula, R 2 is a long-chain alkyl group, R 4 is a hydrogen atom or a lower alkyl group, and HA is an organic or inorganic acid.] After immersing it in an aqueous solution, the through-hole is formed by drying. An etching resist film [B] made of the copper complex of the alkylimidazole compound is formed on the copper surface of the circuit portion including the circuit portion (that is, the portion not covered with the negative resist film [A]), and then immersed in an alkaline aqueous solution. The alkali-soluble resist film [A] is dissolved and removed to expose the copper surface of the negative area, and then treated with an alkaline etching solution (in this case, the area covered with the etching resist film [B] remains unchanged). This is a method for manufacturing the desired copper through-hole printed wiring board.

この方法はアルキルイミダゾール化合物が銅面
に対して選択的に反応して、アルキルイミダゾー
ル化合物の銅錯体からなる耐アルカリ性の高い膜
を形成すると云う特性を利用したものであり、生
産性及び信頼性が高く、かつ製造コストが低い等
の長所を有している。
This method takes advantage of the property that the alkylimidazole compound reacts selectively with the copper surface to form a highly alkali-resistant film made of a copper complex of the alkylimidazole compound, resulting in improved productivity and reliability. It has advantages such as high price and low manufacturing cost.

発明が解決しようとする問題点 しかしながら、特開昭61−90492号公報に記載
の方法は、アルキルイミダゾール化合物の銅錯体
からなるエツチングレジスト膜〔B〕が極めて薄
いので、その物理的強度は必ずしも充分とはいえ
ない。
Problems to be Solved by the Invention However, in the method described in JP-A-61-90492, since the etching resist film [B] made of a copper complex of an alkylimidazole compound is extremely thin, its physical strength is not necessarily sufficient. I can't say that.

即ち、アルカリ性水溶液に可溶なレジスト膜
〔A〕を溶解除去する工程もしくはエツチング工
程において、このエツチングレジスト膜〔B〕
が、固形物と接触した場合あるいはスプレー圧が
高過ぎた場合等には、このエツチングレジスト膜
〔B〕の一部が損傷を受け、良好な製品が得られ
ないということも起こり得る。
That is, in the step of dissolving and removing the resist film [A] soluble in an alkaline aqueous solution or the etching step, this etching resist film [B]
However, if it comes into contact with a solid object or if the spray pressure is too high, a part of this etching resist film [B] may be damaged and a good product may not be obtained.

従つて、このアルキルイミダゾール化合物の銅
錯体からなるエツチングレジスト膜〔B〕の物理
的強度を更に高めることが望まれていた。
Therefore, it has been desired to further increase the physical strength of the etching resist film [B] made of the copper complex of this alkylimidazole compound.

問題を解決するための手段 本発明者等は、このような事情に鑑み鋭意研究
を重ねた結果、両面銅張積層板の必要箇所に穴を
あけ、銅メツキ処理を行い、アルカリ性水溶液に
可溶なレジストを用いて陰画のレジスト膜を形成
し、前記両面銅張積層板を下記一般式で示される
アルキルイミダゾール化合物の塩 一般式 〔但し、式中R2は長鎖アルキル基、R4は水素原
子又は低級アルキル基、HAは有機又は無機の酸
を示す〕 の水溶液に銅張積層板を浸漬した後、更に銅イオ
ンを含む緩衝液に浸漬し、この積層板をアルカリ
性エツチング液で処理することにより、上記の目
的が充分達成されることを見い出し、本発明を完
成することが出来た。
Measures to Solve the Problem In view of the above circumstances, the inventors of the present invention have conducted extensive research, and as a result, have drilled holes at the necessary locations in a double-sided copper-clad laminate, performed copper plating treatment, and developed a solution that is soluble in an alkaline aqueous solution. Form a negative resist film using a resist of [However, in the formula, R 2 is a long-chain alkyl group, R 4 is a hydrogen atom or a lower alkyl group, and HA is an organic or inorganic acid.] After immersing the copper-clad laminate in an aqueous solution containing copper ions, It has been discovered that the above object can be fully achieved by immersing the laminate in a buffer solution and treating the laminate with an alkaline etching solution, thereby completing the present invention.

本発明方法で用いる長鎖アルキルイミダゾール
は銅表面とは強い力で結合するが、積層板を構成
する銅以外の部分に対しては結合力を示さない。
The long-chain alkylimidazole used in the method of the present invention bonds with the copper surface with strong force, but does not show bonding force to parts other than copper that constitute the laminate.

従つて、両面銅張積層板をアルキルイミダゾー
ル化合物の塩を含む水溶液と接触する前に必要と
される陰画のレジスト膜〔A〕の形成は、従来か
ら知られているアルカリ性水溶液に可溶な熱乾燥
型または紫外線硬化型のレジストインキ、アルカ
リ現像感光性フイルムもしくはアルカリ現像型液
状レジストインクを用いて行うことができる。
Therefore, the formation of the negative resist film [A] required before contacting the double-sided copper-clad laminate with an aqueous solution containing a salt of an alkylimidazole compound can be achieved using the conventionally known heat soluble alkaline aqueous solution. This can be carried out using a dry type or ultraviolet curable resist ink, an alkali-developable photosensitive film, or an alkali-developable liquid resist ink.

本発明の方法において用いられる長鎖アルキル
イミダゾールの塩は長鎖アルキル基を有するイミ
ダゾールと有機酸あるいは無機酸のいずれかより
形成されるもので、それらの酸の代表的なもの
は、酢酸、カプリン酸、グリコール酸、パラニト
ロ安息香酸、パラトルエンスルホン酸、ピクリン
酸、蓚酸、コハク酸、マレイン酸、フマール酸、
酒石酸、アジピン酸、塩酸、硫酸、燐酸、乳酸、
オレイン酸、フタル酸等である。
The salt of a long-chain alkylimidazole used in the method of the present invention is formed from an imidazole having a long-chain alkyl group and either an organic acid or an inorganic acid. Acid, glycolic acid, paranitrobenzoic acid, paratoluenesulfonic acid, picric acid, oxalic acid, succinic acid, maleic acid, fumaric acid,
Tartaric acid, adipic acid, hydrochloric acid, sulfuric acid, phosphoric acid, lactic acid,
These include oleic acid and phthalic acid.

穴あけ、銅メツキ処理を行い、アルカリ性水溶
液に可溶なレジストを用いて陰画のレジスト膜を
形成した両面銅張積層板を長鎖アルキルイミダゾ
ールの塩と接触させる工程は、長鎖アルキルイミ
ダゾール塩を0.01〜5%、好ましくは30〜60℃の
温度範囲で数十秒から数十分の範囲で浸漬する。
この銅張積層板を振動させたり、長鎖アルキルイ
ミダゾール塩を含む溶液に撹拌を与えたりまた超
音波を作用させて振動を与えることは一定の膜厚
を短時間で得るのに有効な手段である。また、浸
漬方法以外に液を銅張積層板に沿つて流下させる
方法も可能である。長鎖アルキルイミダゾール塩
を含む水溶液の適当なPHは3.8〜4.5である。
The step of contacting the double-sided copper-clad laminate, which has been subjected to hole-drilling and copper plating and has formed a negative resist film using a resist soluble in an alkaline aqueous solution, with a long-chain alkylimidazole salt is to ~5%, preferably at a temperature range of 30~60°C for a period of several tens of seconds to several tens of minutes.
Vibrating the copper-clad laminate, stirring the solution containing the long-chain alkylimidazole salt, or applying vibration using ultrasonic waves are effective means to obtain a constant film thickness in a short time. be. In addition to the immersion method, a method of flowing the liquid down along the copper-clad laminate is also possible. A suitable pH of an aqueous solution containing a long chain alkylimidazole salt is between 3.8 and 4.5.

次に本発明方法における銅イオンを含む緩衝液
による処理の態様について述べる。
Next, the mode of treatment with a buffer solution containing copper ions in the method of the present invention will be described.

本発明における緩衝液を構成する銅イオンは溶
解して銅イオンを発生するものであればどれでも
よく、それらの代表的なものは、銅板、銅線、銅
粉等の金属銅及び塩化第一銅、塩化第二銅、水酸
化銅、酸化第一銅、酸化第二銅、リン酸銅、炭酸
銅、硫酸銅あるいは酢酸銅等の銅化合物である。
The copper ions constituting the buffer solution in the present invention may be of any material as long as it dissolves to generate copper ions. Typical examples thereof include metallic copper such as copper plates, copper wires, and copper powder, and copper chloride. These are copper compounds such as copper, cupric chloride, copper hydroxide, cuprous oxide, cupric oxide, copper phosphate, copper carbonate, copper sulfate, or copper acetate.

銅イオンを含む緩衝液を構成する酸は、有機酸
あるいは無機酸のどれでもよく、それらの代表的
なものは、酢酸、カプリン酸、グリコール酸、パ
ラニトロ安息香酸、パラニトロスルホン酸、ピク
リン酸、蓚酸、コハク酸、マレイン酸、フマール
酸、酒石酸、アジピン酸、塩酸、硫酸、燐酸、乳
酸、オレイン酸、フタル酸等である。
The acid constituting the buffer solution containing copper ions may be any organic acid or inorganic acid, and representative examples thereof include acetic acid, capric acid, glycolic acid, paranitrobenzoic acid, paranitrosulfonic acid, picric acid, These include oxalic acid, succinic acid, maleic acid, fumaric acid, tartaric acid, adipic acid, hydrochloric acid, sulfuric acid, phosphoric acid, lactic acid, oleic acid, and phthalic acid.

また、銅イオンを含む緩衝液を構成する塩基
は、有機塩基あるいは無機塩基のどれでもよく、
それらの代表的なものは、アンモニア、ジエチル
アミン、トリエチルアミン、モノエタノールアミ
ン、ジエタノールアミン、トリエタノールアミ
ン、ジメチルエタノールアミン、ジエチルエタノ
ールアミン、イソプロピルエタノールアミン、水
酸化リチウム、水酸化カリウム、水酸化ナトリウ
ム等である。
Furthermore, the base constituting the buffer solution containing copper ions may be either an organic base or an inorganic base.
Typical of these are ammonia, diethylamine, triethylamine, monoethanolamine, diethanolamine, triethanolamine, dimethylethanolamine, diethylethanolamine, isopropylethanolamine, lithium hydroxide, potassium hydroxide, sodium hydroxide, etc. .

銅イオン濃度は数PPm以上から効果が認めら
れるが、充分な効果を得るためには50PPm以上
必要であり、緩衝液のPHが7.0以上の場合は銅が
析出し、またPH4.6以下の場合はエツチングレジ
ストの膜厚が減少するので、そのPHは6.0〜4.8の
範囲に保つことが好ましい。
The effect is recognized when the copper ion concentration is several PPm or more, but it is necessary to have a copper ion concentration of 50 PPm or more to obtain a sufficient effect.If the pH of the buffer solution is 7.0 or higher, copper will precipitate, and if the PH is 4.6 or lower, copper will precipitate. Since the film thickness of the etching resist decreases, it is preferable to maintain the pH in the range of 6.0 to 4.8.

浸漬温度は0〜100℃の範囲が可能であるが望
ましくは30℃以上であり、また浸漬時間は数秒〜
数十分の範囲が可能で、約50℃の温度では1〜2
分が適当である。
The immersion temperature can range from 0 to 100°C, but is preferably 30°C or higher, and the immersion time ranges from several seconds to
A range of several tens of minutes is possible, and at a temperature of about 50℃, 1 to 2
minutes is appropriate.

なお、本発明方法は硬質プリント配線板及びフ
レキシブルプリント配線板のいずれにおいても実
施することができる。
Note that the method of the present invention can be carried out on both rigid printed wiring boards and flexible printed wiring boards.

作 用 アルキルイミダゾール化合物の塩の水溶液に銅
張積層板を浸漬すると、アルキルイミダゾール分
子が銅表面に銅錯体を形成し、更に長鎖アルキル
基が有するフアンデルワース力とイミダゾールの
水素結合力によつてアルキルイミダゾール分子が
その上に次々と集合し、エツチングレジスト膜が
成長すると同時に、銅面から膜中への銅の移動が
起こる。しかしながら銅の移動は充分ではなく、
次の乾燥により銅の移動が更に起こるが、完全な
銅錯体になる前にエツチングレジスト膜の硬化が
完了する。即ちこのようにして生じたアルキルイ
ミダゾール化合物の銅錯体からなるエツチングレ
ジスト膜は、銅不足の状態にあり不均一な膜とな
つていると考えられる。一方、前記アルキルイミ
ダゾール化合物の塩の水溶液に銅張積層板を浸漬
したのち、この銅張積層板をさらに銅イオンを含
む緩衝液に浸漬すれば、銅面から膜中への銅の移
動が引き続き進行すると同時に、液中から膜中へ
の銅の移動が起こり、このようにして得られたエ
ツチングレジスト膜は、完全なアルキルイミダゾ
ール化合物の銅錯体からなる均一な膜となり、そ
の物理的強度が著しく向上する。
Effect When a copper-clad laminate is immersed in an aqueous solution of a salt of an alkylimidazole compound, the alkylimidazole molecules form a copper complex on the copper surface, and further, due to the van der Waals force of the long-chain alkyl group and the hydrogen bonding force of imidazole, the alkylimidazole molecules form a copper complex on the copper surface. As a result, alkylimidazole molecules gather one after another on the etching resist film, and at the same time as the etching resist film grows, copper moves from the copper surface into the film. However, the movement of copper is not sufficient;
Further migration of copper occurs during the subsequent drying, but the etching resist film is completely cured before it becomes a complete copper complex. That is, it is considered that the etching resist film made of the copper complex of the alkylimidazole compound thus produced is in a copper-deficient state and becomes a non-uniform film. On the other hand, if a copper-clad laminate is immersed in an aqueous solution of the salt of the alkylimidazole compound and then further immersed in a buffer solution containing copper ions, the movement of copper from the copper surface into the film will continue. At the same time as the etching progresses, copper moves from the solution into the film, and the etching resist film thus obtained becomes a uniform film consisting of a complete copper complex of an alkylimidazole compound, and its physical strength is remarkable. improves.

なお、銅イオンを含む溶液が緩衝液でなけれ
ば、銅張積層板上及びスルーホール内部に残つて
いるアルキルイミダゾール化合物の塩の水溶液が
混入することによりPHが低下し、アルキルイミダ
ゾール化合物の銅錯体からなるエツチングレジス
ト膜を形成するアルキルイミダゾール化合物が処
理液中に溶け出し、エツチングレジストの膜厚が
減少する。しかしこの溶液が緩衝液であれば、処
理後のPHは変動しにくく、従つてエツチングレジ
ストの膜厚はほとんど減少しない。
Note that if the solution containing copper ions is not a buffer solution, the aqueous solution of the salt of the alkylimidazole compound remaining on the copper-clad laminate and inside the through-holes will be mixed in, resulting in a decrease in pH and the formation of the copper complex of the alkylimidazole compound. The alkylimidazole compound forming the etching resist film is dissolved into the processing solution, and the film thickness of the etching resist is reduced. However, if this solution is a buffer solution, the pH after processing will hardly change, and therefore the film thickness of the etching resist will hardly decrease.

実施例 1 1.6m/m厚のFR−4(商品名「R−1705」松
下電工(株)製)両面銅張積層板に穴をあけ、無電解
銅メツキ、続いて電解銅メツキすることにより穴
内部及び両面に25〜30μ厚の銅メツキを形成させ
た。
Example 1 By drilling holes in a 1.6 m/m thick FR-4 (trade name "R-1705" manufactured by Matsushita Electric Works, Ltd.) double-sided copper-clad laminate, electroless copper plating, and then electrolytic copper plating. Copper plating with a thickness of 25 to 30 μm was formed inside the hole and on both sides.

次にアクリル酸・スチレンコポリマーを主成分
とするレジストインク(商品名「KM−10」太陽
インキ製造(株)製)をスクリーン印刷により厚さ
20μ程度の陰画のレジスト膜を形成し、片面づつ
80℃の温度で10分間乾燥した。
Next, a resist ink (trade name "KM-10" manufactured by Taiyo Ink Manufacturing Co., Ltd.) containing acrylic acid/styrene copolymer as the main component is applied by screen printing to create a thickness.
Form a negative resist film of about 20μ and apply on one side at a time.
Dry for 10 minutes at a temperature of 80°C.

次いで、前記処理がされた銅張積層板を過硫酸
ソーダ20%を含む11%硫酸水溶液中に30秒間浸漬
して、銅表面をソフトエツチングしたのち、2−
ウンデシルイミダゾール酢酸塩の2%水溶液(PH
4.45)に50℃の温度で3分間浸漬した。
Next, the treated copper clad laminate was immersed in an 11% sulfuric acid aqueous solution containing 20% sodium persulfate for 30 seconds to soft-etch the copper surface.
2% aqueous solution of undecylimidazole acetate (PH
4.45) for 3 minutes at a temperature of 50°C.

その後、銅張積層板を取り出し、塩化第二銅
0.02%、90%酢酸0.1%及び25%アンモニア水0.1
%を含む緩衝液(PH5.38、銅75PPm)に50℃の温
度で2分間浸漬した。次に銅張積層板を取り出し
水洗して、120℃で10分間乾燥してスルーホール
を含む回路部分の銅表面上に2−ウンデシルイミ
ダゾールの銅錯体からなるエツチングレジスト膜
を形成させた。この膜厚は2.1μで、銅量は2−ウ
ンデシルイミダゾールの銅錯体の理論値の96.4%
であり、膜の鉛筆硬度は3Hであつた。
After that, take out the copper-clad laminate and use cupric chloride.
0.02%, 90% acetic acid 0.1% and 25% ammonia water 0.1
% buffer solution (PH5.38, copper 75PPm) at a temperature of 50°C for 2 minutes. Next, the copper-clad laminate was taken out, washed with water, and dried at 120° C. for 10 minutes to form an etching resist film made of a copper complex of 2-undecylimidazole on the copper surface of the circuit portion including the through holes. The thickness of this film is 2.1μ, and the amount of copper is 96.4% of the theoretical value of the copper complex of 2-undecylimidazole.
The pencil hardness of the film was 3H.

続いて、2%の水酸化ナトリウム水溶液で陰画
のレジスト膜を溶解除去し、配線として残す必要
のない部分の銅を露出させた。
Subsequently, the negative resist film was dissolved and removed using a 2% aqueous sodium hydroxide solution to expose copper in areas that did not need to be left as wiring.

次いで、アルカリ性エツチング剤(商品名「エ
ープロセス」メルテツクス(株)製)を用いて、50℃
でスプレー中に上記処理した銅張積層板を120秒
間通過させてエツチングを行つた。なおエツチン
グのスプレー圧は0.8Kg/cm2及び1.6Kg/cm2にて行
つたが、得られた銅スルーホールプリント配線板
は、スプレー圧0.8Kg/cm2及び1.6Kg/cm2のどれで
も良好であつた。
Next, using an alkaline etching agent (trade name "A Process" manufactured by Meltex Co., Ltd.), the temperature was 50°C.
Etching was carried out by passing the treated copper clad laminate for 120 seconds during spraying. The etching spray pressure was 0.8Kg/cm 2 and 1.6Kg/cm 2 , but the resulting copper through-hole printed wiring board could be etched with any spray pressure of 0.8Kg/cm 2 or 1.6Kg/cm 2 . It was good and warm.

実施例 2 アルキルイミダゾール化合物の塩の水溶液の混
入を想定して、実施例1の塩化第二銅0.02%、90
℃酢酸0.1%及び25%アンモニア水0.1%を含む緩
衝液に2−ウンデシルイミダゾール酢酸塩2%水
溶液(PH4.45)を2%加えた液(PH5.23/銅
75PPm)を用いて同様の処理を行つた結果、エ
ツチングレジストの膜厚は2.0μ、銅量は96.7%、
膜の鉛筆硬度は3Hとなり、得られた銅スルーホ
ールプリント配線板は良好であつた。
Example 2 Assuming the contamination of an aqueous solution of a salt of an alkylimidazole compound, cupric chloride 0.02%, 90
°C A solution containing 0.1% acetic acid and 0.1% 25% ammonia water to which 2% 2-undecylimidazole acetate aqueous solution (PH4.45) was added (PH5.23/copper).
75PPm), the film thickness of the etching resist was 2.0μ, the copper content was 96.7%,
The pencil hardness of the film was 3H, and the resulting copper through-hole printed wiring board was good.

比較例 1 実施例1において、塩化第二銅0.02%、90%酢
酸0.1%及び25%アンモニア水0.1%を含む緩衝液
(PH5.38銅75PPm)に浸漬する工程を除いて、他
は全く同様の処理を行つたところ、エツチングレ
ジスト膜の膜厚は2.1μ、銅量は66.6%、膜の鉛筆
硬度はFとなり、得られた銅スルーホールプリン
ト配線板は、スプレー圧0.8Kg/cm2では良好あつ
たが、1.6Kg/cm2では配線部の銅の一部に欠落が
生じた。
Comparative Example 1 Exactly the same as in Example 1 except for the step of immersing in a buffer solution (PH5.38 copper 75PPm) containing 0.02% cupric chloride, 0.1% 90% acetic acid and 0.1% 25% aqueous ammonia. When the above treatment was carried out, the thickness of the etching resist film was 2.1 μ, the copper content was 66.6%, and the pencil hardness of the film was F. The resulting copper through-hole printed wiring board was Although the temperature was good, at 1.6 kg/cm 2 part of the copper in the wiring part was missing.

比較例 2 銅イオンを含む溶液が緩衝液でない場合のアル
キルイミダゾール化合物の塩の水溶液の混入を想
定して、実施例1の塩化第二銅0.02%、90%酢酸
0.1%及び25%アンモニア水0.1%を含む緩衝液
(PH5.38、銅75PPm)の代わりに塩化第二銅0.02
%と2−ウンデシルイミダゾール酢酸塩の2%水
溶液を2%含む水溶液(PH4.56、銅75PPm)を用
いて同様の処理を行つた。この場合、エツチング
レジストの膜厚は1.3μに減少し、銅量は97.4%膜
の鉛筆硬度は3Hとなり、得られた銅スルーホー
ルプリント配線板は、スプレー圧0.8Kg/cm2及び
1.6Kg/cm2のいずれも配線部の銅の一部に欠落が
生じた。
Comparative Example 2 Assuming the contamination of an aqueous solution of a salt of an alkylimidazole compound when the solution containing copper ions is not a buffer solution, 0.02% cupric chloride and 90% acetic acid from Example 1 were used.
0.02 cupric chloride instead of 0.1% and 25% buffer containing 0.1% aqueous ammonia (PH5.38, copper 75PPm)
A similar treatment was carried out using an aqueous solution (PH 4.56, copper 75 PPm) containing 2% aqueous solution of 2% and 2-undecylimidazole acetate. In this case, the film thickness of the etching resist was reduced to 1.3μ, the copper content was 97.4%, the pencil hardness of the film was 3H, and the resulting copper through-hole printed wiring board was sprayed at a spray pressure of 0.8Kg/cm 2 and
In both cases of 1.6 kg/cm 2 , a portion of the copper in the wiring section was missing.

発明の効果 本発明方法は、アルキルイミダゾール化合物の
銅錯体からなるエツチングレジスト膜の物理的強
度が向上し、信頼性が更に高まる結果、より効率
的な銅スルーホールプリント配線板の製造が可能
となる。
Effects of the Invention The method of the present invention improves the physical strength of an etching resist film made of a copper complex of an alkylimidazole compound and further increases its reliability, making it possible to manufacture copper through-hole printed wiring boards more efficiently. .

Claims (1)

【特許請求の範囲】 1 両面銅張積層板の必要箇所に穴をあけ、銅メ
ツキ処理を行い、アルカリ性水溶液に可溶なレジ
ストを用いて陰画のレジスト膜を形成し、前記両
面銅張積層板を、下記一般式で示されるアルキル
イミダゾール化合物の塩 一般式 〔但し、式中R2は長鎖アルキル基、R4は水素原
子又は低級アルキル基、HAは有機又は無機の酸
を示す〕 の水溶液に浸漬して、銅表面に前記アルキルイミ
ダゾール化合物の銅錯体からなるエツチングレジ
スト膜を形成し、次いで前記処理がなされた両面
銅張積層板を銅イオンを含む緩衝液に浸漬したの
ち、この積層板をアルカリ性エツチング液に接触
させることを特徴とする銅スルーホールプリント
配線板の製造方法。
[Scope of Claims] 1. Holes are drilled at necessary locations in the double-sided copper-clad laminate, copper plating is performed, and a negative resist film is formed using a resist soluble in an alkaline aqueous solution, and the double-sided copper-clad laminate is is a salt of an alkylimidazole compound represented by the following general formula. [However, in the formula, R 2 is a long-chain alkyl group, R 4 is a hydrogen atom or a lower alkyl group, and HA is an organic or inorganic acid]. A copper through-hole characterized in that an etching resist film is formed, the double-sided copper-clad laminate subjected to the above treatment is immersed in a buffer solution containing copper ions, and then the laminate is brought into contact with an alkaline etching solution. A method for manufacturing printed wiring boards.
JP17055786A 1986-07-18 1986-07-18 Manufacture of copper through-hole printed wiring board Granted JPS6327091A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17055786A JPS6327091A (en) 1986-07-18 1986-07-18 Manufacture of copper through-hole printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17055786A JPS6327091A (en) 1986-07-18 1986-07-18 Manufacture of copper through-hole printed wiring board

Publications (2)

Publication Number Publication Date
JPS6327091A JPS6327091A (en) 1988-02-04
JPH0250636B2 true JPH0250636B2 (en) 1990-11-02

Family

ID=15907061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17055786A Granted JPS6327091A (en) 1986-07-18 1986-07-18 Manufacture of copper through-hole printed wiring board

Country Status (1)

Country Link
JP (1) JPS6327091A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2526251Y2 (en) * 1991-08-23 1997-02-19 宇部興産株式会社 Extrusion press mandrel cleaning device
US5275694A (en) * 1992-03-24 1994-01-04 Sanwa Laboratory Ltd. Process for production of copper through-hole printed wiring boards
JP6012393B2 (en) * 2012-10-23 2016-10-25 四国化成工業株式会社 Copper surface treatment agent and surface treatment method
JP6591284B2 (en) * 2014-12-29 2019-10-16 四国化成工業株式会社 Metal surface treatment liquid, surface treatment method and use thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027033A (en) * 1973-07-11 1975-03-20
JPS5118896A (en) * 1974-08-07 1976-02-14 Hitachi Metals Ltd
JPS6190492A (en) * 1984-10-11 1986-05-08 四国化成工業株式会社 Manufacture of copper through hole printed circuit board

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027033A (en) * 1973-07-11 1975-03-20
JPS5118896A (en) * 1974-08-07 1976-02-14 Hitachi Metals Ltd
JPS6190492A (en) * 1984-10-11 1986-05-08 四国化成工業株式会社 Manufacture of copper through hole printed circuit board

Also Published As

Publication number Publication date
JPS6327091A (en) 1988-02-04

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