JPH0250607U - - Google Patents
Info
- Publication number
- JPH0250607U JPH0250607U JP13065688U JP13065688U JPH0250607U JP H0250607 U JPH0250607 U JP H0250607U JP 13065688 U JP13065688 U JP 13065688U JP 13065688 U JP13065688 U JP 13065688U JP H0250607 U JPH0250607 U JP H0250607U
- Authority
- JP
- Japan
- Prior art keywords
- columnar sample
- width
- tip
- columnar
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000005070 sampling Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Image Processing (AREA)
- Facsimile Scanning Arrangements (AREA)
Description
第１図は本考案の一実施例を示すブロツク図、
第２図は本考案の一実施例による検出画像の図、
第３図は従来の一例を示すブロツク図、第４図は
従来の一例による検出画像の図である。
１０１…第１スリツト光学系、１０２…第２ス
リツト光学系、１０３…一次元センサ、１０４…
移動テーブル、１０５…柱状試料先端検出部、１
０６…主制御部、１０７…平行光束、１０８…柱
状試料先端、１０９…柱状試料、１１０…ランド
、２０１…リング照明系、２０２…ＩＴＶカメラ
、２０３…柱状試料先端検出部、２０４…柱状試
料先端、２０５…柱状試料、２０６…ランド、３
０１…柱状試料先端、３０２…曲がつている柱状
試料の先端、４０１…ランド、４０２…柱状試料
先端、４０３…曲がつている柱状試料の先端。
FIG. 1 is a block diagram showing an embodiment of the present invention.
FIG. 2 is a diagram of a detected image according to an embodiment of the present invention;
FIG. 3 is a block diagram showing a conventional example, and FIG. 4 is a diagram of a detected image according to a conventional example. 101... First slit optical system, 102... Second slit optical system, 103... One-dimensional sensor, 104...
Moving table, 105...Columnar sample tip detection section, 1
06... Main control unit, 107... Parallel light flux, 108... Columnar sample tip, 109... Column sample, 110... Land, 201... Ring illumination system, 202... ITV camera, 203... Column sample tip detection unit, 204... Column sample tip , 205... Columnar sample, 206... Land, 3
01... Tip of the columnar sample, 302... Tip of the curved columnar sample, 401... Land, 402... Tip of the columnar sample, 403... Tip of the curved columnar sample.
Claims (1)
向と呼ぶ）に並んだ複数個から成る柱状試料のＹ
方向の幅の平行光束を照射する複数個のスリツト
光学系と、柱状試料先端をＹ方向に撮像する一次
元センサと、柱状試料を搭載しＹ方向に垂直な方
向（以下Ｘ方向と呼ぶ）に移動する移動テーブル
と、前記一次元センサからの２値化した出力信号
の信号幅が柱状試料先端幅に対応するあらかじめ
設定した信号幅内にあることを検出する柱状試料
先端検出部と、前記一次元センサの入力画像のサ
ンプリング信号を柱状試料先端検出部に与え、サ
ンプリング信号と同期させて前記移動テーブルを
駆動する主制御部とを含むことを特徴とする柱状
試料先端検出装置。 Y of a columnar sample consisting of multiple pieces arranged in a straight line (hereinafter referred to as the Y direction) with an annular land at the base
It is equipped with a plurality of slit optical systems that irradiate parallel light beams with a width in the direction, a one-dimensional sensor that images the tip of the columnar sample in the Y direction, and a columnar sample that is mounted in a direction perpendicular to the Y direction (hereinafter referred to as the X direction). a moving table; a columnar sample tip detection unit that detects that the signal width of the binary output signal from the one-dimensional sensor is within a preset signal width corresponding to the columnar sample tip width; What is claimed is: 1. A columnar sample tip detection device comprising: a main control section that applies a sampling signal of an input image of an original sensor to a columnar sample tip detection section and drives the moving table in synchronization with the sampling signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13065688U JPH0250607U (en) | 1988-10-04 | 1988-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13065688U JPH0250607U (en) | 1988-10-04 | 1988-10-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0250607U true JPH0250607U (en) | 1990-04-09 |
Family
ID=31386020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13065688U Pending JPH0250607U (en) | 1988-10-04 | 1988-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0250607U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012038692A (en) * | 2010-08-12 | 2012-02-23 | Alpha- Design Kk | Connector defect inspection device |
-
1988
- 1988-10-04 JP JP13065688U patent/JPH0250607U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012038692A (en) * | 2010-08-12 | 2012-02-23 | Alpha- Design Kk | Connector defect inspection device |
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