JPH0243606U - - Google Patents
Info
- Publication number
- JPH0243606U JPH0243606U JP12094988U JP12094988U JPH0243606U JP H0243606 U JPH0243606 U JP H0243606U JP 12094988 U JP12094988 U JP 12094988U JP 12094988 U JP12094988 U JP 12094988U JP H0243606 U JPH0243606 U JP H0243606U
- Authority
- JP
- Japan
- Prior art keywords
- imaging
- diffraction image
- plane
- center point
- predetermined point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003384 imaging method Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案の実施例を示す一部ブロツク線
図を含む正面断面図である。
１０：制御テーブル、３０：撮像装置、４０：
投光装置。
FIG. 1 is a front sectional view, including a partial block diagram, showing an embodiment of the present invention. 10: control table, 30: imaging device, 40:
floodlight device.
Claims (1)
装置の撮像面に導入して、その拡大回折像を結像
させ、その回折像の中心点を撮像面の所定点に位
置合せするための装置において、上記撮像装置は
平面上の異なる２方向に移動自在な制御テーブル
に固着し、撮像面内の所定点と回折像の中心点の
偏差を画像処理装置により検出し、その検出信号
に基づいて上記制御テーブルの移動量の制御を行
なわせることを特徴とする位置合せ装置。 In a device for introducing a beam spot emitted from a light projection device onto an imaging surface of an imaging device, forming an enlarged diffraction image thereof, and aligning the center point of the diffraction image to a predetermined point on the imaging surface, The imaging device is fixed to a control table that is movable in two different directions on a plane, and an image processing device detects the deviation between a predetermined point in the imaging plane and the center point of the diffraction image, and the above control is performed based on the detection signal. An alignment device characterized by controlling the amount of movement of a table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12094988U JPH0548085Y2 (en) | 1988-09-14 | 1988-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12094988U JPH0548085Y2 (en) | 1988-09-14 | 1988-09-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0243606U true JPH0243606U (en) | 1990-03-26 |
| JPH0548085Y2 JPH0548085Y2 (en) | 1993-12-20 |
Family
ID=31367518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12094988U Expired - Lifetime JPH0548085Y2 (en) | 1988-09-14 | 1988-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0548085Y2 (en) |
-
1988
- 1988-09-14 JP JP12094988U patent/JPH0548085Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0548085Y2 (en) | 1993-12-20 |