JPH0248736U - - Google Patents

Info

Publication number
JPH0248736U
JPH0248736U JP12585388U JP12585388U JPH0248736U JP H0248736 U JPH0248736 U JP H0248736U JP 12585388 U JP12585388 U JP 12585388U JP 12585388 U JP12585388 U JP 12585388U JP H0248736 U JPH0248736 U JP H0248736U
Authority
JP
Japan
Prior art keywords
refrigerator
air
passes
purifier
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12585388U
Other languages
Japanese (ja)
Other versions
JPH0526423Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988125853U priority Critical patent/JPH0526423Y2/ja
Publication of JPH0248736U publication Critical patent/JPH0248736U/ja
Application granted granted Critical
Publication of JPH0526423Y2 publication Critical patent/JPH0526423Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Ventilation (AREA)
  • Drying Of Gases (AREA)
  • Devices For Use In Laboratory Experiments (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は低湿清浄庫の正面図、第2図は内側断
面図を示す。 以下各記号は下記の通り。1……空気清浄器、
2―2′……自動乾燥器(湿度調節器付)、3…
…キヤビネツト本体、4……棚、5……層流拡散
口、6……外気流入量調節式空気取入口、7……
中間背板、8……背板流入口、9……脚、10…
…扉、11……背板部流入口、12……排気口。
FIG. 1 shows a front view of the low-humidity clean room, and FIG. 2 shows an inside sectional view. The symbols below are as follows. 1...Air purifier,
2-2'... Automatic dryer (with humidity controller), 3...
... Cabinet body, 4 ... Shelf, 5 ... Laminar flow diffusion port, 6 ... Outside air inflow rate adjustable air intake, 7 ...
Intermediate back plate, 8... Back plate inlet, 9... Leg, 10...
...door, 11...back plate inlet, 12...exhaust port.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 庫内を防湿壁面で構成した開閉扉付密閉構造の
庫内に吸湿作用を行う乾燥器と清浄作用を行う清
浄器とを設け、庫内に清浄空気が循環する如く背
面板により仕切り、上方より清浄空気を吐出させ
、各棚間隙を透過し下方に層流拡散口(ラインデ
イフエーザー)を経て、底面から背面へ庫内空気
を循環させ、この底面部からは外気流入量調節式
空気も併せ取入れ可能な如くして、背面へ庫内空
気を誘導し背面に配置した除湿作用を行う自動乾
燥器を1ケまたは複数箇経て、上部の空気清浄器
にあるフアンに吸入される如く構成し低湿清浄庫
の構造。
A dryer that absorbs moisture and a purifier that cleans are installed inside the refrigerator, which has a sealed structure with a moisture-proof wall and an opening/closing door, and is partitioned by a back plate so that clean air can circulate inside the refrigerator. Clean air is discharged, passes through each shelf gap, passes through the laminar flow diffusion port (line diffuser), and circulates the air inside the refrigerator from the bottom to the back. The air inside the refrigerator is guided to the back, passes through one or more automatic dryers that perform dehumidification placed at the back, and is then sucked into the fan in the air purifier at the top. Structure of a low humidity clean room.
JP1988125853U 1988-09-27 1988-09-27 Expired - Lifetime JPH0526423Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988125853U JPH0526423Y2 (en) 1988-09-27 1988-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988125853U JPH0526423Y2 (en) 1988-09-27 1988-09-27

Publications (2)

Publication Number Publication Date
JPH0248736U true JPH0248736U (en) 1990-04-04
JPH0526423Y2 JPH0526423Y2 (en) 1993-07-05

Family

ID=31376825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988125853U Expired - Lifetime JPH0526423Y2 (en) 1988-09-27 1988-09-27

Country Status (1)

Country Link
JP (1) JPH0526423Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994012265A1 (en) * 1992-12-02 1994-06-09 Ebara-Infilco Co., Ltd. Method and apparatus for preventing contamination of substrate or substrate surface

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3343474B2 (en) * 1996-02-06 2002-11-11 東洋リビング株式会社 Automatic drying equipment

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532066Y1 (en) * 1967-04-27 1970-12-08
JPS605488U (en) * 1983-06-24 1985-01-16 株式会社椿本チエイン Rotating shelf type cleaning device
JPS616299A (en) * 1984-06-20 1986-01-11 Mitsubishi Motors Corp Rust preventive treatment of metallic fitting for vibration-proof rubber

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4272366A (en) * 1979-08-16 1981-06-09 Fmc Corporation Heavy duty two mass vibratory machine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532066Y1 (en) * 1967-04-27 1970-12-08
JPS605488U (en) * 1983-06-24 1985-01-16 株式会社椿本チエイン Rotating shelf type cleaning device
JPS616299A (en) * 1984-06-20 1986-01-11 Mitsubishi Motors Corp Rust preventive treatment of metallic fitting for vibration-proof rubber

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994012265A1 (en) * 1992-12-02 1994-06-09 Ebara-Infilco Co., Ltd. Method and apparatus for preventing contamination of substrate or substrate surface

Also Published As

Publication number Publication date
JPH0526423Y2 (en) 1993-07-05

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