JPH0248736U - - Google Patents
Info
- Publication number
- JPH0248736U JPH0248736U JP12585388U JP12585388U JPH0248736U JP H0248736 U JPH0248736 U JP H0248736U JP 12585388 U JP12585388 U JP 12585388U JP 12585388 U JP12585388 U JP 12585388U JP H0248736 U JPH0248736 U JP H0248736U
- Authority
- JP
- Japan
- Prior art keywords
- refrigerator
- air
- passes
- purifier
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 2
- 238000007791 dehumidification Methods 0.000 claims 1
Landscapes
- Ventilation (AREA)
- Drying Of Gases (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Description
第1図は低湿清浄庫の正面図、第2図は内側断
面図を示す。
以下各記号は下記の通り。1……空気清浄器、
2―2′……自動乾燥器(湿度調節器付)、3…
…キヤビネツト本体、4……棚、5……層流拡散
口、6……外気流入量調節式空気取入口、7……
中間背板、8……背板流入口、9……脚、10…
…扉、11……背板部流入口、12……排気口。
FIG. 1 shows a front view of the low-humidity clean room, and FIG. 2 shows an inside sectional view. The symbols below are as follows. 1...Air purifier,
2-2'... Automatic dryer (with humidity controller), 3...
... Cabinet body, 4 ... Shelf, 5 ... Laminar flow diffusion port, 6 ... Outside air inflow rate adjustable air intake, 7 ...
Intermediate back plate, 8... Back plate inlet, 9... Leg, 10...
...door, 11...back plate inlet, 12...exhaust port.
Claims (1)
庫内に吸湿作用を行う乾燥器と清浄作用を行う清
浄器とを設け、庫内に清浄空気が循環する如く背
面板により仕切り、上方より清浄空気を吐出させ
、各棚間隙を透過し下方に層流拡散口(ラインデ
イフエーザー)を経て、底面から背面へ庫内空気
を循環させ、この底面部からは外気流入量調節式
空気も併せ取入れ可能な如くして、背面へ庫内空
気を誘導し背面に配置した除湿作用を行う自動乾
燥器を1ケまたは複数箇経て、上部の空気清浄器
にあるフアンに吸入される如く構成し低湿清浄庫
の構造。 A dryer that absorbs moisture and a purifier that cleans are installed inside the refrigerator, which has a sealed structure with a moisture-proof wall and an opening/closing door, and is partitioned by a back plate so that clean air can circulate inside the refrigerator. Clean air is discharged, passes through each shelf gap, passes through the laminar flow diffusion port (line diffuser), and circulates the air inside the refrigerator from the bottom to the back. The air inside the refrigerator is guided to the back, passes through one or more automatic dryers that perform dehumidification placed at the back, and is then sucked into the fan in the air purifier at the top. Structure of a low humidity clean room.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988125853U JPH0526423Y2 (en) | 1988-09-27 | 1988-09-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988125853U JPH0526423Y2 (en) | 1988-09-27 | 1988-09-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0248736U true JPH0248736U (en) | 1990-04-04 |
JPH0526423Y2 JPH0526423Y2 (en) | 1993-07-05 |
Family
ID=31376825
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988125853U Expired - Lifetime JPH0526423Y2 (en) | 1988-09-27 | 1988-09-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0526423Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994012265A1 (en) * | 1992-12-02 | 1994-06-09 | Ebara-Infilco Co., Ltd. | Method and apparatus for preventing contamination of substrate or substrate surface |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3343474B2 (en) * | 1996-02-06 | 2002-11-11 | 東洋リビング株式会社 | Automatic drying equipment |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4532066Y1 (en) * | 1967-04-27 | 1970-12-08 | ||
JPS605488U (en) * | 1983-06-24 | 1985-01-16 | 株式会社椿本チエイン | Rotating shelf type cleaning device |
JPS616299A (en) * | 1984-06-20 | 1986-01-11 | Mitsubishi Motors Corp | Rust preventive treatment of metallic fitting for vibration-proof rubber |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4272366A (en) * | 1979-08-16 | 1981-06-09 | Fmc Corporation | Heavy duty two mass vibratory machine |
-
1988
- 1988-09-27 JP JP1988125853U patent/JPH0526423Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4532066Y1 (en) * | 1967-04-27 | 1970-12-08 | ||
JPS605488U (en) * | 1983-06-24 | 1985-01-16 | 株式会社椿本チエイン | Rotating shelf type cleaning device |
JPS616299A (en) * | 1984-06-20 | 1986-01-11 | Mitsubishi Motors Corp | Rust preventive treatment of metallic fitting for vibration-proof rubber |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994012265A1 (en) * | 1992-12-02 | 1994-06-09 | Ebara-Infilco Co., Ltd. | Method and apparatus for preventing contamination of substrate or substrate surface |
Also Published As
Publication number | Publication date |
---|---|
JPH0526423Y2 (en) | 1993-07-05 |
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