JPH0248171U - - Google Patents
Info
- Publication number
- JPH0248171U JPH0248171U JP12910988U JP12910988U JPH0248171U JP H0248171 U JPH0248171 U JP H0248171U JP 12910988 U JP12910988 U JP 12910988U JP 12910988 U JP12910988 U JP 12910988U JP H0248171 U JPH0248171 U JP H0248171U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- container
- path
- valve
- dripping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 14
- 238000001914 filtration Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 2
- 230000007423 decrease Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12910988U JPH0614831Y2 (ja) | 1988-09-30 | 1988-09-30 | 滴下装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12910988U JPH0614831Y2 (ja) | 1988-09-30 | 1988-09-30 | 滴下装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0248171U true JPH0248171U (enrdf_load_html_response) | 1990-04-03 |
| JPH0614831Y2 JPH0614831Y2 (ja) | 1994-04-20 |
Family
ID=31383080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12910988U Expired - Lifetime JPH0614831Y2 (ja) | 1988-09-30 | 1988-09-30 | 滴下装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0614831Y2 (enrdf_load_html_response) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04294538A (ja) * | 1991-03-22 | 1992-10-19 | Rohm Co Ltd | 薬液塗布装置における薬液供給装置 |
| JPH0520853U (ja) * | 1991-08-30 | 1993-03-19 | 株式会社アツギユニシア | 切削機械のドリルユニツト構造 |
| JP2013098479A (ja) * | 2011-11-04 | 2013-05-20 | Tokyo Electron Ltd | 処理液供給方法、プログラム、コンピュータ記憶媒体及び処理液供給装置 |
| JP2017220547A (ja) * | 2016-06-07 | 2017-12-14 | 東京エレクトロン株式会社 | 処理液供給装置、機器ユニット、処理液供給方法及び記憶媒体 |
-
1988
- 1988-09-30 JP JP12910988U patent/JPH0614831Y2/ja not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04294538A (ja) * | 1991-03-22 | 1992-10-19 | Rohm Co Ltd | 薬液塗布装置における薬液供給装置 |
| JPH0520853U (ja) * | 1991-08-30 | 1993-03-19 | 株式会社アツギユニシア | 切削機械のドリルユニツト構造 |
| JP2013098479A (ja) * | 2011-11-04 | 2013-05-20 | Tokyo Electron Ltd | 処理液供給方法、プログラム、コンピュータ記憶媒体及び処理液供給装置 |
| JP2017220547A (ja) * | 2016-06-07 | 2017-12-14 | 東京エレクトロン株式会社 | 処理液供給装置、機器ユニット、処理液供給方法及び記憶媒体 |
| CN107470051A (zh) * | 2016-06-07 | 2017-12-15 | 东京毅力科创株式会社 | 处理液供给装置、设备单元、处理液供给方法和存储介质 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0614831Y2 (ja) | 1994-04-20 |