JPH024674U - - Google Patents
Info
- Publication number
- JPH024674U JPH024674U JP8325588U JP8325588U JPH024674U JP H024674 U JPH024674 U JP H024674U JP 8325588 U JP8325588 U JP 8325588U JP 8325588 U JP8325588 U JP 8325588U JP H024674 U JPH024674 U JP H024674U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate support
- support member
- circular
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 14
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000013013 elastic material Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8325588U JPH024674U (bs) | 1988-06-23 | 1988-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8325588U JPH024674U (bs) | 1988-06-23 | 1988-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH024674U true JPH024674U (bs) | 1990-01-12 |
Family
ID=31307980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8325588U Pending JPH024674U (bs) | 1988-06-23 | 1988-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH024674U (bs) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05169003A (ja) * | 1991-12-20 | 1993-07-09 | Tokyo Ohka Kogyo Co Ltd | 塗布装置 |
| JP2002143735A (ja) * | 2000-11-13 | 2002-05-21 | Honda Lock Mfg Co Ltd | 車両用ミラーのコーティング装置 |
| JP2006095366A (ja) * | 2004-09-28 | 2006-04-13 | Central Glass Co Ltd | 塗布装置および塗布方法 |
-
1988
- 1988-06-23 JP JP8325588U patent/JPH024674U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05169003A (ja) * | 1991-12-20 | 1993-07-09 | Tokyo Ohka Kogyo Co Ltd | 塗布装置 |
| JP2002143735A (ja) * | 2000-11-13 | 2002-05-21 | Honda Lock Mfg Co Ltd | 車両用ミラーのコーティング装置 |
| JP2006095366A (ja) * | 2004-09-28 | 2006-04-13 | Central Glass Co Ltd | 塗布装置および塗布方法 |