JPH024674U - - Google Patents
Info
- Publication number
- JPH024674U JPH024674U JP8325588U JP8325588U JPH024674U JP H024674 U JPH024674 U JP H024674U JP 8325588 U JP8325588 U JP 8325588U JP 8325588 U JP8325588 U JP 8325588U JP H024674 U JPH024674 U JP H024674U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate support
- support member
- circular
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 14
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000013013 elastic material Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
Description
第１図ないし第４図は本考案の第１実施例に係
り、第１図は縦断側面図、第２図は平面図、第３
図は一部切り欠き斜視図、第４図は塗布状態を示
す要部拡大断面図、第５図は第１実施例の変形例
を示す縦断側面図、第６図は第２実施例の縦断側
面図、第７図はその分解斜視図、第８図は第２実
施例の変形例を示す縦断側面図である。また、第
９図は従来例の縦断側面図である。
１……回転テーブル、３……基板支持部材、４
……基板、５……凹部、６……基板支持面、８…
…吸着チヤツク、ａ……基板の下側角縁。
1 to 4 relate to the first embodiment of the present invention, in which FIG. 1 is a vertical side view, FIG. 2 is a plan view, and FIG.
The figure is a partially cutaway perspective view, FIG. 4 is an enlarged sectional view of the main part showing the coating state, FIG. 5 is a longitudinal side view showing a modification of the first embodiment, and FIG. 6 is a longitudinal section of the second embodiment. 7 is an exploded perspective view thereof, and FIG. 8 is a longitudinal sectional side view showing a modification of the second embodiment. Further, FIG. 9 is a longitudinal sectional side view of the conventional example. 1...Rotary table, 3...Substrate support member, 4
...Substrate, 5...Recess, 6...Substrate support surface, 8...
...Suction chuck, a... Lower corner edge of the board.
Claims (1)
状に嵌め入れる凹部を形成するとともに、この凹
部内に基板を吸引保持する吸着チヤツクを備え、
かつ、前記凹部の少なくとも周壁部を弾性材から
なる基板支持部材で構成するとともに、この基板
支持部材の内周辺には基板の下側角縁に当接する
傾斜状の基板支持面を形成してある非円形基板の
回転塗布装置。 (2) 請求項(1)に記載の非円形基板の回転塗布装
置において、基板支持部材と回転テーブルとは別
部材からなり、回転テーブルに基板支持部材を保
持する保持手段を具備する非円形基板の回転塗布
装置。[Claims for Utility Model Registration] (1) A recess into which a non-circular substrate is fitted substantially flush is formed on the top surface of the rotary table, and a suction chuck is provided to suction and hold the substrate within the recess;
At least a peripheral wall portion of the recess is formed of a substrate support member made of an elastic material, and an inclined substrate support surface that abuts a lower corner edge of the substrate is formed on the inner periphery of the substrate support member. Rotary coating equipment for non-circular substrates. (2) In the spin coating apparatus for a non-circular substrate according to claim (1), the substrate support member and the rotary table are separate members, and the non-circular substrate is provided with a holding means for holding the substrate support member on the rotary table. Rotary coating equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8325588U JPH024674U (en) | 1988-06-23 | 1988-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8325588U JPH024674U (en) | 1988-06-23 | 1988-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH024674U true JPH024674U (en) | 1990-01-12 |
Family
ID=31307980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8325588U Pending JPH024674U (en) | 1988-06-23 | 1988-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH024674U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05169003A (en) * | 1991-12-20 | 1993-07-09 | Tokyo Ohka Kogyo Co Ltd | Coating liquid applying device |
| JP2002143735A (en) * | 2000-11-13 | 2002-05-21 | Honda Lock Mfg Co Ltd | Coating apparatus for vehicular mirror |
| JP2006095366A (en) * | 2004-09-28 | 2006-04-13 | Central Glass Co Ltd | Coating apparatus and coating method |
-
1988
- 1988-06-23 JP JP8325588U patent/JPH024674U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05169003A (en) * | 1991-12-20 | 1993-07-09 | Tokyo Ohka Kogyo Co Ltd | Coating liquid applying device |
| JP2002143735A (en) * | 2000-11-13 | 2002-05-21 | Honda Lock Mfg Co Ltd | Coating apparatus for vehicular mirror |
| JP2006095366A (en) * | 2004-09-28 | 2006-04-13 | Central Glass Co Ltd | Coating apparatus and coating method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH024674U (en) | ||
| JPS6237932U (en) | ||
| USD313249S (en) | Game board | |
| JPS61169560U (en) | ||
| JPS5938311U (en) | ceiling material | |
| JPS62133877U (en) | ||
| JPS61196294U (en) | ||
| JPH0253413U (en) | ||
| JPH0318875U (en) | ||
| JPS6222251U (en) | ||
| JPS6047447U (en) | Vacuum parts for polisher | |
| JPH0265550U (en) | ||
| JPS6128594U (en) | ruler | |
| JPH0189735U (en) | ||
| JPH0359158U (en) | ||
| JPS61112641U (en) | ||
| JPH01110436U (en) | ||
| JPS6340799U (en) | ||
| JPS6450468U (en) | ||
| JPH0463356U (en) | ||
| JPS60188119U (en) | Transport/display box | |
| JPS59111517U (en) | watch band | |
| JPH02134014U (en) | ||
| JPS62126285U (en) | ||
| JPS62118009U (en) |