JPH024667B2 - - Google Patents

Info

Publication number

JPH024667B2

JPH024667B2 JP57090208A JP9020882A JPH024667B2 JP H024667 B2 JPH024667 B2 JP H024667B2 JP 57090208 A JP57090208 A JP 57090208A JP 9020882 A JP9020882 A JP 9020882A JP H024667 B2 JPH024667 B2 JP H024667B2

Authority

JP

Japan

Prior art keywords

copper

electrical contact

resistance

contact

nitride

Prior art date

1982-05-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

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• 239000000463 material Substances 0.000 claims description 24
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 13
• 229910052802 copper Inorganic materials 0.000 claims description 12
• 239000010949 copper Substances 0.000 claims description 12
• -1 phosphorus nitride Chemical class 0.000 claims description 8
• 229910052698 phosphorus Inorganic materials 0.000 claims description 6
• 239000011574 phosphorus Substances 0.000 claims description 6
• 238000005538 encapsulation Methods 0.000 claims description 5
• 238000003466 welding Methods 0.000 description 9
• 239000002131 composite material Substances 0.000 description 5
• 230000008018 melting Effects 0.000 description 5
• 238000002844 melting Methods 0.000 description 5
• BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
• ASMQPJTXPYCZBL-UHFFFAOYSA-N [O-2].[Cd+2].[Ag+] Chemical compound [O-2].[Cd+2].[Ag+] ASMQPJTXPYCZBL-UHFFFAOYSA-N 0.000 description 3
• 239000000203 mixture Substances 0.000 description 3
• 239000000843 powder Substances 0.000 description 3
• 239000004332 silver Substances 0.000 description 3
• NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
• 229910045601 alloy Inorganic materials 0.000 description 2
• 239000000956 alloy Substances 0.000 description 2
• 239000006185 dispersion Substances 0.000 description 2
• 150000004767 nitrides Chemical class 0.000 description 2
• 239000012299 nitrogen atmosphere Substances 0.000 description 2
• 239000002245 particle Substances 0.000 description 2
• 239000010970 precious metal Substances 0.000 description 2
• 229910052709 silver Inorganic materials 0.000 description 2
• 229910001316 Ag alloy Inorganic materials 0.000 description 1
• 229910001020 Au alloy Inorganic materials 0.000 description 1
• 229910000925 Cd alloy Inorganic materials 0.000 description 1
• 229910001252 Pd alloy Inorganic materials 0.000 description 1
• 238000005299 abrasion Methods 0.000 description 1
• 238000005054 agglomeration Methods 0.000 description 1
• 230000002776 aggregation Effects 0.000 description 1
• 239000012298 atmosphere Substances 0.000 description 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 description 1
• NSAODVHAXBZWGW-UHFFFAOYSA-N cadmium silver Chemical compound [Ag].[Cd] NSAODVHAXBZWGW-UHFFFAOYSA-N 0.000 description 1
• CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 description 1
• 238000005266 casting Methods 0.000 description 1
• IUYOGGFTLHZHEG-UHFFFAOYSA-N copper titanium Chemical compound [Ti].[Cu] IUYOGGFTLHZHEG-UHFFFAOYSA-N 0.000 description 1
• 238000005260 corrosion Methods 0.000 description 1
• 230000007797 corrosion Effects 0.000 description 1
• 230000008020 evaporation Effects 0.000 description 1
• 238000001704 evaporation Methods 0.000 description 1
• 239000007789 gas Substances 0.000 description 1
• 239000003353 gold alloy Substances 0.000 description 1
• 239000010410 layer Substances 0.000 description 1
• 230000007935 neutral effect Effects 0.000 description 1
• 229910000510 noble metal Inorganic materials 0.000 description 1
• 230000003647 oxidation Effects 0.000 description 1
• 238000007254 oxidation reaction Methods 0.000 description 1
• 230000002787 reinforcement Effects 0.000 description 1
• 239000012779 reinforcing material Substances 0.000 description 1
• 229910001923 silver oxide Inorganic materials 0.000 description 1
• 230000000087 stabilizing effect Effects 0.000 description 1
• 239000002344 surface layer Substances 0.000 description 1
• 238000005491 wire drawing Methods 0.000 description 1
• ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 description 1