JPH0243864Y2 - - Google Patents
Info
- Publication number
- JPH0243864Y2 JPH0243864Y2 JP13762283U JP13762283U JPH0243864Y2 JP H0243864 Y2 JPH0243864 Y2 JP H0243864Y2 JP 13762283 U JP13762283 U JP 13762283U JP 13762283 U JP13762283 U JP 13762283U JP H0243864 Y2 JPH0243864 Y2 JP H0243864Y2
- Authority
- JP
- Japan
- Prior art keywords
- liquid nitrogen
- sealed container
- trap
- discharge port
- socket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 68
- 239000007788 liquid Substances 0.000 claims description 34
- 229910052757 nitrogen Inorganic materials 0.000 claims description 34
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13762283U JPS6045369U (ja) | 1983-09-05 | 1983-09-05 | 液体窒素の供給装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13762283U JPS6045369U (ja) | 1983-09-05 | 1983-09-05 | 液体窒素の供給装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6045369U JPS6045369U (ja) | 1985-03-30 |
| JPH0243864Y2 true JPH0243864Y2 (fr) | 1990-11-21 |
Family
ID=30309056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13762283U Granted JPS6045369U (ja) | 1983-09-05 | 1983-09-05 | 液体窒素の供給装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6045369U (fr) |
-
1983
- 1983-09-05 JP JP13762283U patent/JPS6045369U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6045369U (ja) | 1985-03-30 |
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