JPH0243864Y2 - - Google Patents

Description

[Detailed Description of the Invention] Industrial Application Field The present invention relates to a liquid nitrogen supply device used to feed liquid nitrogen to a trap installed in a piping system of a vacuum processing apparatus.

BACKGROUND TECHNOLOGY In general, in a vacuum processing apparatus that performs sputtering, vacuum evaporation, etc., a trap T is attached to the outer periphery of a pipe A or is equipped so as to face the inside of the pipe A, as shown in Fig. 2. The vacuum tank V is made to have a high vacuum by condensing oil vapor generated from the oil diffusion pump P by sending liquid nitrogen as a refrigerant into the tank.

Conventionally, in order to supply this liquid nitrogen to a trap, as shown in FIG. Usually, it is poured into the inside of the container.

Problems to be Solved by the Invention However, with this method, it is unavoidable that the liquid nitrogen is wasted as it tends to vaporize from the wide-mouthed container 1 and the injector 2 and evaporate and scatter into the atmosphere.

An object of the present invention is to provide an improved liquid nitrogen supply device that suppresses evaporation of liquid nitrogen and efficiently feeds it into a trap.

Means for Solving the Problems In the liquid nitrogen supply device according to the present invention,
A sealed container containing liquid nitrogen is provided, and a shutoff valve is provided inside the sealed container so as to be freely deflectable with a spring to close the discharge port of the liquid nitrogen, and the discharge port of the sealed container is aligned and sealed. It is constructed by planting and fixing a pin that pushes up the closing valve of the sealed container against a spring into the socket of the trap in which the container is assembled.

Function In this liquid nitrogen supply device, when the discharge port of the sealed container and the socket of the trap are aligned and the sealed container is assembled to the trap, the shutoff valve of the sealed container is connected to the pin installed in the socket of the trap. is pushed up to open the discharge port of the sealed container, and the liquid nitrogen stored in the sealed container can be directly flowed into the trap from the discharge port through the socket, so the liquid nitrogen can be poured into the trap without contacting the atmosphere. You will be able to send it.

Embodiment The following will be described below with reference to FIG.

This liquid nitrogen supply device is equipped to feed liquid nitrogen to the trap 10, which serves as a refrigerant for condensing oil vapor and the like generated from an oil diffusion pump of a vacuum processing device. The trap 10 can be attached to the outer periphery of the piping of the vacuum processing apparatus or can be assembled so as to face the inside of the piping, and is configured to feed liquid nitrogen from a sealed container 11 to the trap 10.
The sealed container 11 is formed to be airtight so that the liquid nitrogen does not evaporate, and the container 11 is made entirely of transparent or translucent glass, plastic, etc., or has a see-through window in a portion so that the remaining capacity can be determined. It can be configured to do so. Further, the sealed container 11 is provided with a liquid nitrogen discharge port 12 on the bottom side, and the discharge port 12 is configured to be closed by a closing valve 13 provided inside the sealed container 11. A shutoff valve 13 for closing the discharge port 12 has a valve box 13a attached to the inside of the sealed container 11 in a manner corresponding to the opening position of the discharge port 12.
A has a valve body 13c pressed against the inner surface of the sealed container 11 by a spring 13b so as to close the discharge port 12, and this valve body 13c is pressed by a spring 1.
3b so that the discharge port 12 can be opened by deflecting the discharge port 12. The sealed container 11
is assembled to the upper side of the trap 10 with the discharge port 12 aligned with the socket 14 of the trap 11, and the valve body 13c of the shutoff valve 13 is placed in the socket 14 of the trap 10 against the spring 13a. A pin 15, which is pushed up and deflected, is planted and fixed at the center of the socket 14 so as to project slightly above the mouth edge. The sealed container 11 can be configured to be refillable with liquid nitrogen by removably screwing the cap 14 onto the upper side.

In the liquid nitrogen supply device configured in this way,
The discharge port 12 of the sealed container 11 is aligned with the socket 14 of the trap 10, and the sealed container 11 is placed in the trap 1.
By assembling and arranging the trap 10 on the upper side of the trap 10, liquid nitrogen can be fed into the trap 10. When feeding the liquid nitrogen, the sealed container 11 may simply be pressed and supported while the operator feeds the required amount of liquid nitrogen into the trap 10.
It can also be attached to the trap 10 by providing a threaded flange on 4 and screwing it onto the outlet 12 of the sealed container 11. When this sealed container 11 is assembled to the trap 10, the pin 15 protruding from the socket 14 pushes up the valve body 13c of the closing valve 13 of the sealed container 11 against the spring 13b, and the discharge port is closed by the closing valve 13. Open 12. Along with that,
Liquid nitrogen contained in the sealed container 11 flows directly into the trap 10 from the discharge port 12 through the socket 14. After supplying the required amount of liquid nitrogen, the sealed container 11 is removed from the trap 10, and the valve body 13c of the shutoff valve 13, which is no longer pressed by the pin 15, closes the discharge port 12 again by the deflection of the spring 13b. It can be kept airtight to prevent liquid nitrogen from leaking out. Further, the socket 14 of the trap 10 may be immediately sealed with a cap, stopper, etc. after the sealed container 11 is removed.

Effects of the Device As described above, according to the liquid nitrogen supply device of the present invention, liquid nitrogen can be directly flowed into the trap from the discharge port of the sealed container through the socket without contacting the atmosphere at all. , it becomes possible to efficiently send liquid nitrogen to the trap without evaporating it.

[Brief explanation of drawings]

Fig. 1 is an explanatory diagram showing a liquid nitrogen supply device according to the present invention, Fig. 2 is an explanatory diagram showing equipment locations in a trap vacuum processing apparatus according to an example, and Fig. 3 is an explanatory diagram showing a liquid nitrogen supply device according to a conventional example. It is an explanatory view showing a device. 10: Trap, 11: Sealed container, 12: Discharge port, 13: Shutoff valve, 13b: Spring, 14:
Socket, 15: Pin.

Claims (1)

[Scope of utility model registration request] A sealed container containing liquid nitrogen is provided, and a shutoff valve is provided inside the sealed container so as to be freely deflectable with a spring to close the discharge port of the liquid nitrogen, and the discharge port of the sealed container is aligned and sealed. A liquid nitrogen supply device characterized in that a pin for pushing up a closing valve of a sealed container against a spring is planted and fixed in the socket of a trap in which the container is assembled.