JPH0241436U - - Google Patents

Info

Publication number
JPH0241436U
JPH0241436U JP11185686U JP11185686U JPH0241436U JP H0241436 U JPH0241436 U JP H0241436U JP 11185686 U JP11185686 U JP 11185686U JP 11185686 U JP11185686 U JP 11185686U JP H0241436 U JPH0241436 U JP H0241436U
Authority
JP
Japan
Prior art keywords
wafer
carrier
wafer carrier
shelf
receiving plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11185686U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521885Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11185686U priority Critical patent/JPH0521885Y2/ja
Publication of JPH0241436U publication Critical patent/JPH0241436U/ja
Application granted granted Critical
Publication of JPH0521885Y2 publication Critical patent/JPH0521885Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP11185686U 1986-07-21 1986-07-21 Expired - Lifetime JPH0521885Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11185686U JPH0521885Y2 (https=) 1986-07-21 1986-07-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11185686U JPH0521885Y2 (https=) 1986-07-21 1986-07-21

Publications (2)

Publication Number Publication Date
JPH0241436U true JPH0241436U (https=) 1990-03-22
JPH0521885Y2 JPH0521885Y2 (https=) 1993-06-04

Family

ID=31350276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11185686U Expired - Lifetime JPH0521885Y2 (https=) 1986-07-21 1986-07-21

Country Status (1)

Country Link
JP (1) JPH0521885Y2 (https=)

Also Published As

Publication number Publication date
JPH0521885Y2 (https=) 1993-06-04

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