JPH0241435U - - Google Patents

Info

Publication number
JPH0241435U
JPH0241435U JP12056588U JP12056588U JPH0241435U JP H0241435 U JPH0241435 U JP H0241435U JP 12056588 U JP12056588 U JP 12056588U JP 12056588 U JP12056588 U JP 12056588U JP H0241435 U JPH0241435 U JP H0241435U
Authority
JP
Japan
Prior art keywords
wafer
stage
prober
wafer prober
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12056588U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12056588U priority Critical patent/JPH0241435U/ja
Publication of JPH0241435U publication Critical patent/JPH0241435U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第1図aは本考案の実施例1を示す断面図、第
1図bは同斜視図、第2図a,bは本考案の実施
例1におけるウエハー搭載状態を示す断面図、第
3図a,bは本考案の実施例2を示す断面図、第
4図aは従来例を示す断面図、第4図bは同斜視
図である。 1…ステージ本体、2…真空ポンプ、3…吸着
孔、4…弾性体、5…ばね、6…ウエハー、7…
空隙。

Claims (1)

    【実用新案登録請求の範囲】
  1. 集積回路ウエハを搭載するウエハープローバー
    用ステージにおいて、ステージ本体の上面に、真
    空吸着されるウエハーにより圧下されて圧縮変形
    する1ケ又は複数個の滑り止め用弾性体を有する
    ことを特徴とするウエハープローバー用ステージ
JP12056588U 1988-09-14 1988-09-14 Pending JPH0241435U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12056588U JPH0241435U (ja) 1988-09-14 1988-09-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12056588U JPH0241435U (ja) 1988-09-14 1988-09-14

Publications (1)

Publication Number Publication Date
JPH0241435U true JPH0241435U (ja) 1990-03-22

Family

ID=31366789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12056588U Pending JPH0241435U (ja) 1988-09-14 1988-09-14

Country Status (1)

Country Link
JP (1) JPH0241435U (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04105290U (ja) * 1991-02-15 1992-09-10 大阪瓦斯株式会社 管継手
JP2005156317A (ja) * 2003-11-25 2005-06-16 Sony Corp 電子部品測定装置及び電子部品測定方法
JP2017220484A (ja) * 2016-06-03 2017-12-14 日本特殊陶業株式会社 真空吸着装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04105290U (ja) * 1991-02-15 1992-09-10 大阪瓦斯株式会社 管継手
JP2005156317A (ja) * 2003-11-25 2005-06-16 Sony Corp 電子部品測定装置及び電子部品測定方法
JP2017220484A (ja) * 2016-06-03 2017-12-14 日本特殊陶業株式会社 真空吸着装置

Similar Documents

Publication Publication Date Title
JPH0241435U (ja)
JPH028043U (ja)
JPH01127833U (ja)
JPH02796U (ja)
JPH0339841U (ja)
JPH0312440U (ja)
JPH02106891U (ja)
JPS6199434U (ja)
JPH0336140U (ja)
JPS6384941U (ja)
JPH0388348U (ja)
JPH0256440U (ja)
JPH0227730U (ja)
JPS6447072U (ja)
JPS632175U (ja)
JPH0343741U (ja)
JPS6286022U (ja)
JPS6426831U (ja)
JPH01116454U (ja)
JPS5968874U (ja) 舌状弁装置
JPH0444174U (ja)
JPH01154481U (ja)
JPS61107181U (ja)
JPH0275744U (ja)
JPS6058531U (ja) シフトレバ−のブ−ツ