JPH0241109U - - Google Patents

Info

Publication number
JPH0241109U
JPH0241109U JP11951688U JP11951688U JPH0241109U JP H0241109 U JPH0241109 U JP H0241109U JP 11951688 U JP11951688 U JP 11951688U JP 11951688 U JP11951688 U JP 11951688U JP H0241109 U JPH0241109 U JP H0241109U
Authority
JP
Japan
Prior art keywords
ultrasonic sensor
film thickness
substrate
visualized
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11951688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11951688U priority Critical patent/JPH0241109U/ja
Publication of JPH0241109U publication Critical patent/JPH0241109U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP11951688U 1988-09-12 1988-09-12 Pending JPH0241109U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11951688U JPH0241109U (en:Method) 1988-09-12 1988-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11951688U JPH0241109U (en:Method) 1988-09-12 1988-09-12

Publications (1)

Publication Number Publication Date
JPH0241109U true JPH0241109U (en:Method) 1990-03-22

Family

ID=31364817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11951688U Pending JPH0241109U (en:Method) 1988-09-12 1988-09-12

Country Status (1)

Country Link
JP (1) JPH0241109U (en:Method)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120803A (ja) * 1984-07-10 1986-01-29 Toppan Printing Co Ltd 膜厚測定方法
JPS61225611A (ja) * 1985-03-29 1986-10-07 Agency Of Ind Science & Technol 光・超音波併用形測定用複合ヘツド
JPS6382312A (ja) * 1986-09-26 1988-04-13 Toppan Printing Co Ltd 膜厚測定方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120803A (ja) * 1984-07-10 1986-01-29 Toppan Printing Co Ltd 膜厚測定方法
JPS61225611A (ja) * 1985-03-29 1986-10-07 Agency Of Ind Science & Technol 光・超音波併用形測定用複合ヘツド
JPS6382312A (ja) * 1986-09-26 1988-04-13 Toppan Printing Co Ltd 膜厚測定方法

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