Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Tokico Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokico LtdfiledCriticalTokico Ltd
Priority to JP57163396ApriorityCriticalpatent/JPS5951179A/ja
Publication of JPS5951179ApublicationCriticalpatent/JPS5951179A/ja
Publication of JPH0240872B2publicationCriticalpatent/JPH0240872B2/ja
F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms