JPH0238759U - - Google Patents
Info
- Publication number
- JPH0238759U JPH0238759U JP1988118234U JP11823488U JPH0238759U JP H0238759 U JPH0238759 U JP H0238759U JP 1988118234 U JP1988118234 U JP 1988118234U JP 11823488 U JP11823488 U JP 11823488U JP H0238759 U JPH0238759 U JP H0238759U
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- ceramic layers
- ceramic layer
- layers
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 15
- 238000010304 firing Methods 0.000 claims 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010587 phase diagram Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988118234U JPH0639468Y2 (ja) | 1988-09-08 | 1988-09-08 | セラミックスアクチュエータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988118234U JPH0639468Y2 (ja) | 1988-09-08 | 1988-09-08 | セラミックスアクチュエータ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0238759U true JPH0238759U (US06373033-20020416-M00071.png) | 1990-03-15 |
| JPH0639468Y2 JPH0639468Y2 (ja) | 1994-10-12 |
Family
ID=31362408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988118234U Expired - Lifetime JPH0639468Y2 (ja) | 1988-09-08 | 1988-09-08 | セラミックスアクチュエータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0639468Y2 (US06373033-20020416-M00071.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002218771A (ja) * | 2001-01-24 | 2002-08-02 | Matsushita Electric Ind Co Ltd | アクチュエータおよびその製造方法 |
| JP2006346830A (ja) * | 2005-06-17 | 2006-12-28 | Toshiba Corp | マイクロメカニカルデバイス、マイクロスイッチ、容量可変キャパシタ、高周波回路及び光学スイッチ |
| JP2016027651A (ja) * | 2014-07-01 | 2016-02-18 | セイコーエプソン株式会社 | 圧電素子、アクチュエーター装置、液体噴射ヘッド、液体噴射装置及び超音波測定装置 |
-
1988
- 1988-09-08 JP JP1988118234U patent/JPH0639468Y2/ja not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002218771A (ja) * | 2001-01-24 | 2002-08-02 | Matsushita Electric Ind Co Ltd | アクチュエータおよびその製造方法 |
| JP2006346830A (ja) * | 2005-06-17 | 2006-12-28 | Toshiba Corp | マイクロメカニカルデバイス、マイクロスイッチ、容量可変キャパシタ、高周波回路及び光学スイッチ |
| JP4580826B2 (ja) * | 2005-06-17 | 2010-11-17 | 株式会社東芝 | マイクロメカニカルデバイス、マイクロスイッチ、容量可変キャパシタ、高周波回路及び光学スイッチ |
| JP2016027651A (ja) * | 2014-07-01 | 2016-02-18 | セイコーエプソン株式会社 | 圧電素子、アクチュエーター装置、液体噴射ヘッド、液体噴射装置及び超音波測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0639468Y2 (ja) | 1994-10-12 |
