JPH0238497Y2 - - Google Patents
Info
- Publication number
- JPH0238497Y2 JPH0238497Y2 JP3638684U JP3638684U JPH0238497Y2 JP H0238497 Y2 JPH0238497 Y2 JP H0238497Y2 JP 3638684 U JP3638684 U JP 3638684U JP 3638684 U JP3638684 U JP 3638684U JP H0238497 Y2 JPH0238497 Y2 JP H0238497Y2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- holding
- piezoelectric
- terminal
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- 239000010935 stainless steel Substances 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 7
- 239000013078 crystal Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 239000010409 thin film Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 229910001020 Au alloy Inorganic materials 0.000 description 2
- 239000003353 gold alloy Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- RZVXOCDCIIFGGH-UHFFFAOYSA-N chromium gold Chemical compound [Cr].[Au] RZVXOCDCIIFGGH-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- MSNOMDLPLDYDME-UHFFFAOYSA-N gold nickel Chemical compound [Ni].[Au] MSNOMDLPLDYDME-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【考案の詳細な説明】 （産業上の利用分野） 本考案は、圧電振動子の保持構造に関する。[Detailed explanation of the idea] (Industrial application field) The present invention relates to a holding structure for a piezoelectric vibrator.
（従来技術）
圧電振動子は、電子機器など種々の分野で使用
されている。(Prior Art) Piezoelectric vibrators are used in various fields such as electronic equipment.
第１図は圧電振動子の保持構造の一例を示す図
である。同図において、１は圧電振動子で、圧電
振動子１は、例えばATカツト等の水晶片からな
る圧電素子２の両面に電極３ａ，３ｂ（３ｂは水
晶片２の裏面に形成されている）を設けることに
より形成されている。４ａ，４ｂは電極３ａ，３
ｂの一部より外方へ延びる端子部で、端子部４
ａ，４ｂは互いに反対方向に延びている（４ｂは
水晶片２の裏面に形成されている）。なお、前記
電極３ａ，３ｂ及び端子部４ａ，４ｂは金，銀，
アルミニウム，ニツケルと金の合金，クロムと金
の合金などの金属を圧電素子２の両面に真空蒸着
やスパツター等の技術によつて形成する。 FIG. 1 is a diagram showing an example of a holding structure for a piezoelectric vibrator. In the figure, 1 is a piezoelectric vibrator, and the piezoelectric vibrator 1 has electrodes 3a and 3b on both sides of a piezoelectric element 2 made of a crystal piece such as an AT cut (3b is formed on the back side of the crystal piece 2). It is formed by providing. 4a, 4b are electrodes 3a, 3
A terminal portion extending outward from a part of b, and the terminal portion 4
a and 4b extend in opposite directions (4b is formed on the back surface of the crystal piece 2). Note that the electrodes 3a, 3b and terminal portions 4a, 4b are made of gold, silver,
A metal such as aluminum, a nickel-gold alloy, a chromium-gold alloy, or the like is formed on both sides of the piezoelectric element 2 by a technique such as vacuum deposition or sputtering.
そして、上記圧電振動子１上の端子部４ａ，４
ｂはそれぞれ、基台５に設けた保持部材６，６の
保持部６ａ，６ｂに接着され、また、保持部材
６，６の他端部は外部導出ピン７，７の端部に固
定され、これによつて圧電振動子１は基台５上に
固定されている。そして、電極３ａ，３ｂは端子
部４ａ，４ｂ、保持部６ａ，６ｂ、保持部材６，
６を介して、外部導出ピン７，７に電気的に接続
されるものである。 Terminal portions 4a, 4 on the piezoelectric vibrator 1
b are respectively glued to the holding parts 6a and 6b of the holding members 6 and 6 provided on the base 5, and the other ends of the holding members 6 and 6 are fixed to the ends of the external lead-out pins 7 and 7, The piezoelectric vibrator 1 is thereby fixed on the base 5. The electrodes 3a, 3b include terminal portions 4a, 4b, holding portions 6a, 6b, holding member 6,
6, it is electrically connected to external lead-out pins 7, 7.
ところで、保持部材６，６の保持部６ａ，６ｂ
を、それぞれ端子部４ａ，４ｂに固着するために
は、従来一般的に、半田による接着方法が用いら
れていた。また、半田付けを用いない他の接着法
として、端子部４ａ，４ｂに保持部６ａ，６ｂを
熱圧着させて両者を支持する工法や、さらに超音
波熔接法により両者を接着する工法も開発されて
いる。 By the way, the holding parts 6a, 6b of the holding members 6, 6
In order to fix these to the terminal portions 4a and 4b, respectively, a bonding method using solder has conventionally been generally used. In addition, as other bonding methods that do not use soldering, a method has been developed in which the holding portions 6a and 6b are thermocompression bonded to the terminal portions 4a and 4b to support both, and a method in which the two are bonded using ultrasonic welding. ing.
（従来技術の問題点）
しかしながら、第１図に示す保持部材６，６の
材質にステンレスを用いた場合は、上記の従来の
接着方法のいずれによつても、これを圧電振動子
の電極の端子部４ａ，４ｂに接着することが出来
なかつた。(Problems with the prior art) However, when stainless steel is used as the material for the holding members 6, 6 shown in FIG. It was not possible to bond the terminal parts 4a and 4b.
（考案の目的）
本考案の目的は、圧電振動子１の電極の端子部
４ａ，４ｂにステンレスからなる保持部材６，６
の保持部６ａ，６ｂを接着出来る圧電振動子の保
持構造を提供することにある。(Purpose of the invention) The object of the invention is to attach the holding members 6, 6 made of stainless steel to the terminal parts 4a, 4b of the electrodes of the piezoelectric vibrator 1.
An object of the present invention is to provide a piezoelectric vibrator holding structure to which the holding parts 6a and 6b of the piezoelectric vibrator can be bonded.
（考案の概要）
本考案は、圧電振動子１と該圧電振動子１を保
持する保持部材６とを接続する圧電振動子の保持
構造において、圧電素子２と、該圧電素子２上に
形成された電極３ａ，３ｂの端子部４ａ，４ｂ
と、ステンレスからなる保持部材６，６の保持部
６ａ，６ｂと、該電極の端子部４ａ，４ｂと保持
部６ａ，６ｂとの間に介在せしめた厚さが5μm乃
至50μmのアルミニウム薄膜８とを一体に接着せ
しめた圧電振動子の保持構造を提供するものであ
る。(Summary of the invention) The invention provides a piezoelectric vibrator holding structure that connects a piezoelectric vibrator 1 and a holding member 6 that holds the piezoelectric vibrator 1. Terminal parts 4a, 4b of electrodes 3a, 3b
and holding parts 6a and 6b of holding members 6 and 6 made of stainless steel, and an aluminum thin film 8 with a thickness of 5 μm to 50 μm interposed between the terminal parts 4a and 4b of the electrodes and the holding parts 6a and 6b. The present invention provides a piezoelectric vibrator holding structure in which the piezoelectric vibrator is bonded together.
（実施例） 以下、本考案について詳細に説明する。(Example) The present invention will be explained in detail below.
第２図ａ乃至ｃは、本考案に係る圧電振動子の
保持構造を作成する工程を示す断面図であり、第
１図に示す矢印Ａ，Ａ方向に圧電振動子を切断
し、矢印Ｂ方向から電極の端子部４ａ，４ｂ部分
を見た図である。 FIGS. 2a to 2c are cross-sectional views showing the process of creating a piezoelectric vibrator holding structure according to the present invention, in which the piezoelectric vibrator is cut in the directions of arrows A and A shown in FIG. FIG. 3 is a diagram showing the terminal portions 4a and 4b of the electrode from the front.
同図中、第１図と同一部分は同一符号を付し
て、その詳細な説明は省略する。 In the figure, the same parts as in FIG. 1 are designated by the same reference numerals, and detailed explanation thereof will be omitted.
同図ａにおいて、１は圧電振動子、２は水晶片か
らなる圧電素子、３ａ，３ｂは電極、４ａは電極
３ａの端子部である。圧電振動子１は該圧電振動
子１を加熱するホツトプレート１０の上に載置さ
れている。６ａはステンレスで構成され、端子部
４ａと結合接着される保持部材６の保持部であ
る。８はアルミニウム薄膜で、その厚さは5μm乃
至50μmであり、その平面は保持部６ａの平面全
面を覆うものであることが望ましい。９は矢印Ｃ
方向に圧力を加えるとともに、矢印Ｄ方向に超音
波振動をする圧力・超音波振動供給源である。In the figure a, 1 is a piezoelectric vibrator, 2 is a piezoelectric element made of a crystal piece, 3a and 3b are electrodes, and 4a is a terminal portion of the electrode 3a. The piezoelectric vibrator 1 is placed on a hot plate 10 that heats the piezoelectric vibrator 1. Reference numeral 6a denotes a holding portion of the holding member 6, which is made of stainless steel and is bonded and bonded to the terminal portion 4a. 8 is an aluminum thin film, the thickness of which is 5 μm to 50 μm, and its flat surface preferably covers the entire flat surface of the holding portion 6a. 9 is arrow C
This is a pressure/ultrasonic vibration supply source that applies pressure in the direction of arrow D and also generates ultrasonic vibration in the direction of arrow D.
本考案に係る圧電振動子の保持構造は、まず、
同図ａに示すようにホツトプレート１０上に載置
した圧電振動子１上の端子部４ａと、保持部６ａ
との間にアルミニウム薄膜８を挿入する。しかる
後、保持部６ａの上から圧力・超音波振動供給源
９を矢印Ｃ方向に移動させ、圧電振動子１上の端
子部４ａと保持部６ａをアルミニウム薄膜８を介
して同図ｂのように密着させる。そして、圧力・
超音波振動供給源９は保持部６ａに200乃至1000
ｇの圧力を加える。尚、ホツトプレート１０は、
圧電振動子１を、あらかじめ又は同図ｂの状態
で、200℃乃至500℃に加熱する。そして、圧力・
超音波振動供給源９によつて、保持部６ａに超音
波振動を与えると、圧電振動子１上の端子部４ａ
とステンレスからなる保持部６ａとはアルミニウ
ムを介して強固に結合・接続されることが実験で
確かめられた。 The holding structure of the piezoelectric vibrator according to the present invention is as follows:
As shown in FIG.
An aluminum thin film 8 is inserted between the two. After that, the pressure/ultrasonic vibration supply source 9 is moved from above the holding part 6a in the direction of arrow C, and the terminal part 4a on the piezoelectric vibrator 1 and the holding part 6a are connected through the aluminum thin film 8 as shown in FIG. Closely contact. And the pressure
The ultrasonic vibration supply source 9 has a frequency of 200 to 1000 to the holding part 6a.
Apply a pressure of g. In addition, the hot plate 10 is
The piezoelectric vibrator 1 is heated to 200° C. to 500° C. in advance or in the state shown in FIG. And the pressure
When ultrasonic vibration is applied to the holding part 6a by the ultrasonic vibration supply source 9, the terminal part 4a on the piezoelectric vibrator 1
It has been confirmed through experiments that the holding part 6a made of stainless steel and the holding part 6a are firmly bonded and connected through aluminum.
なお、本考案は上記の一実施例のみに適用され
るものではなく、他の水晶振動子、たとえば、音
叉形水晶振動子、ATカツト水晶振動子、セラミ
ツクスサポータ振動子、高安定水晶振動子、コン
ベツクス型振動子、はり合わせた屈曲振動子にも
同様に適用できることは言うまでもない。 Note that the present invention is not applied only to the above-mentioned embodiment, but can be applied to other crystal resonators, such as a tuning fork crystal resonator, an AT cut crystal resonator, a ceramic supporter resonator, a highly stable crystal resonator, Needless to say, the present invention can be similarly applied to convex type vibrators and bonded bending vibrators.
さらに、本考案に係る圧電振動子は、水晶のみ
でなく、他の圧電素子にも応用できることは言う
までもない。 Furthermore, it goes without saying that the piezoelectric vibrator according to the present invention can be applied not only to crystal but also to other piezoelectric elements.
（考案の効果）
以上詳細に説明したように、本考案によれば、
ステンレスからなる保持部材６，６の保持部６
ａ，６ｂであつても、これを圧電振動子１の電極
の端子部４ａ，４ｂに容易に接着することが出来
る。(Effects of the invention) As explained in detail above, according to the invention,
Holding portion 6 of holding members 6, 6 made of stainless steel
a, 6b, they can be easily bonded to the terminal portions 4a, 4b of the electrodes of the piezoelectric vibrator 1.
また、半田を接着材として使用する場合に比
べ、たとえ高温（500℃以上）中であつても使用
が可能である。 Furthermore, compared to the case where solder is used as an adhesive, it can be used even at high temperatures (500°C or higher).
第１図は圧電振動子の保持構造の一例を示す図
である。第２図ａ乃至ｃは、本考案に係る圧電振
動子の保持構造を作成する工程を示す断面図であ
る。
１……圧電振動子、２……圧電素子、３ａ，３
ｂ……電極、４ａ……端子部、５……基台、６…
…保持部材、６ａ……保持部、７……外部導出ピ
ン、８……アルミニウム薄膜、９……圧力・超音
波振動供給源、１０……ホツトプレート。
FIG. 1 is a diagram showing an example of a holding structure for a piezoelectric vibrator. FIGS. 2a to 2c are cross-sectional views showing the process of creating a piezoelectric vibrator holding structure according to the present invention. 1...Piezoelectric vibrator, 2...Piezoelectric element, 3a, 3
b...electrode, 4a...terminal section, 5...base, 6...
...Holding member, 6a... Holding portion, 7... External lead-out pin, 8... Aluminum thin film, 9... Pressure/ultrasonic vibration supply source, 10... Hot plate.
Claims (1)
とを接続する圧電振動子の保持構造において、圧
電素子と、該圧電素子上に形成された電極の端子
部と、ステンレスからなる保持部材の保持部と、
該電極の端子部と保持部との間に介在せしめた厚
さが5μm乃至50μmのアルミニウム薄膜とを一体
に接着せしめたことを特徴とする圧電振動子の保
持構造。 In a piezoelectric vibrator holding structure that connects a piezoelectric vibrator and a holding member that holds the piezoelectric vibrator, the piezoelectric element, a terminal portion of an electrode formed on the piezoelectric element, and a holding member made of stainless steel are held. Department and
A holding structure for a piezoelectric vibrator, characterized in that a thin aluminum film having a thickness of 5 μm to 50 μm interposed between the terminal portion of the electrode and the holding portion is bonded together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3638684U JPS60149239U (en) | 1984-03-14 | 1984-03-14 | Piezoelectric vibrator holding structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3638684U JPS60149239U (en) | 1984-03-14 | 1984-03-14 | Piezoelectric vibrator holding structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60149239U JPS60149239U (en) | 1985-10-03 |
| JPH0238497Y2 true JPH0238497Y2 (en) | 1990-10-17 |
Family
ID=30541516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3638684U Granted JPS60149239U (en) | 1984-03-14 | 1984-03-14 | Piezoelectric vibrator holding structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60149239U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7235567B2 (en) * | 2019-04-02 | 2023-03-08 | 積水化学工業株式会社 | piezo sensor |
-
1984
- 1984-03-14 JP JP3638684U patent/JPS60149239U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60149239U (en) | 1985-10-03 |
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