JPH0238465U - - Google Patents

Info

Publication number
JPH0238465U
JPH0238465U JP11635288U JP11635288U JPH0238465U JP H0238465 U JPH0238465 U JP H0238465U JP 11635288 U JP11635288 U JP 11635288U JP 11635288 U JP11635288 U JP 11635288U JP H0238465 U JPH0238465 U JP H0238465U
Authority
JP
Japan
Prior art keywords
substrate
base body
attracted
annular base
holding mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11635288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0453Y2 (US06623731-20030923-C00052.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988116352U priority Critical patent/JPH0453Y2/ja
Publication of JPH0238465U publication Critical patent/JPH0238465U/ja
Application granted granted Critical
Publication of JPH0453Y2 publication Critical patent/JPH0453Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1988116352U 1988-09-02 1988-09-02 Expired JPH0453Y2 (US06623731-20030923-C00052.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988116352U JPH0453Y2 (US06623731-20030923-C00052.png) 1988-09-02 1988-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988116352U JPH0453Y2 (US06623731-20030923-C00052.png) 1988-09-02 1988-09-02

Publications (2)

Publication Number Publication Date
JPH0238465U true JPH0238465U (US06623731-20030923-C00052.png) 1990-03-14
JPH0453Y2 JPH0453Y2 (US06623731-20030923-C00052.png) 1992-01-06

Family

ID=31358811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988116352U Expired JPH0453Y2 (US06623731-20030923-C00052.png) 1988-09-02 1988-09-02

Country Status (1)

Country Link
JP (1) JPH0453Y2 (US06623731-20030923-C00052.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52110538U (US06623731-20030923-C00052.png) * 1976-02-16 1977-08-23
JPS5349667A (en) * 1976-10-16 1978-05-06 Spodig Heinrich Adhesive plate with permanent magnet
JPS58126978A (ja) * 1982-01-22 1983-07-28 Hitachi Ltd 基板の保持装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52110538U (US06623731-20030923-C00052.png) * 1976-02-16 1977-08-23
JPS5349667A (en) * 1976-10-16 1978-05-06 Spodig Heinrich Adhesive plate with permanent magnet
JPS58126978A (ja) * 1982-01-22 1983-07-28 Hitachi Ltd 基板の保持装置

Also Published As

Publication number Publication date
JPH0453Y2 (US06623731-20030923-C00052.png) 1992-01-06

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