JPH0237440U - - Google Patents

Info

Publication number

JPH0237440U

JPH0237440U JP11621688U JP11621688U JPH0237440U JP H0237440 U JPH0237440 U JP H0237440U JP 11621688 U JP11621688 U JP 11621688U JP 11621688 U JP11621688 U JP 11621688U JP H0237440 U JPH0237440 U JP H0237440U

Authority

JP

Japan

Prior art keywords

electrode

outer circumferential

accelerating electrode

circumferential surface

flange

Prior art date

1988-09-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000000605 extraction Methods 0.000 claims description 7
• 238000010884 ion-beam technique Methods 0.000 claims description 4
• 150000002500 ions Chemical class 0.000 claims 6
• 239000007772 electrode material Substances 0.000 claims 1
• 239000007789 gas Substances 0.000 claims 1
• 239000007769 metal material Substances 0.000 claims 1
• 230000007935 neutral effect Effects 0.000 claims 1
• 239000002245 particle Substances 0.000 claims 1
• 239000012212 insulator Substances 0.000 description 1

Cited By (1)