JPH0237342U - - Google Patents
Info
- Publication number
- JPH0237342U JPH0237342U JP11576988U JP11576988U JPH0237342U JP H0237342 U JPH0237342 U JP H0237342U JP 11576988 U JP11576988 U JP 11576988U JP 11576988 U JP11576988 U JP 11576988U JP H0237342 U JPH0237342 U JP H0237342U
- Authority
- JP
- Japan
- Prior art keywords
- silicon chip
- measurement fluid
- orifice
- substrate
- support base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims description 9
- 239000012530 fluid Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 1
- 210000002445 nipple Anatomy 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11576988U JPH073308Y2 (ja) | 1988-09-02 | 1988-09-02 | 一体形差圧センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11576988U JPH073308Y2 (ja) | 1988-09-02 | 1988-09-02 | 一体形差圧センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0237342U true JPH0237342U (un) | 1990-03-12 |
JPH073308Y2 JPH073308Y2 (ja) | 1995-01-30 |
Family
ID=31357718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11576988U Expired - Lifetime JPH073308Y2 (ja) | 1988-09-02 | 1988-09-02 | 一体形差圧センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH073308Y2 (un) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013015160A (ja) * | 2011-06-30 | 2013-01-24 | Kitz Corp | 流量計測機能付きボールバルブとその自動ボールバルブ |
-
1988
- 1988-09-02 JP JP11576988U patent/JPH073308Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013015160A (ja) * | 2011-06-30 | 2013-01-24 | Kitz Corp | 流量計測機能付きボールバルブとその自動ボールバルブ |
Also Published As
Publication number | Publication date |
---|---|
JPH073308Y2 (ja) | 1995-01-30 |