JPH023646U - - Google Patents
Info
- Publication number
- JPH023646U JPH023646U JP8120188U JP8120188U JPH023646U JP H023646 U JPH023646 U JP H023646U JP 8120188 U JP8120188 U JP 8120188U JP 8120188 U JP8120188 U JP 8120188U JP H023646 U JPH023646 U JP H023646U
- Authority
- JP
- Japan
- Prior art keywords
- ions
- primary
- emitted
- ion
- extraction electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 11
- 238000000605 extraction Methods 0.000 claims 2
- 230000001133 acceleration Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の一実施例を示す構成図である
。
１…１次イオン源、２…１次イオン、３…１次
イオン加速管、４…ターゲツト、５…２次イオン
、６…引出し電極、７…２次イオン加速管、８…
マスフイルタ。
FIG. 1 is a block diagram showing an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Primary ion source, 2... Primary ion, 3... Primary ion accelerating tube, 4... Target, 5... Secondary ion, 6... Extracting electrode, 7... Secondary ion accelerating tube, 8...
mass filter.
Claims (1)
される１次イオンの進行方向に配されたターゲツ
トと、上記１次イオンの衝突により上記ターゲツ
トから放出される２次イオンを同一方向に進行さ
せる引出し電極と、該引出し電極によつて集めら
れた２次イオンを加速出射する加速管と、を備え
ることを特徴とするイオン銃。 (2) 上記２次イオンの進行方向に特定のイオン
だけを通過させるマスフイルターを設けることを
特徴とする請求項１記載のイオン銃。[Claims for Utility Model Registration] (1) A primary ion source, a target disposed in the traveling direction of primary ions emitted from the primary ion source, and a primary ion emitted from the target due to collision of the primary ions. An ion gun comprising: an extraction electrode that causes secondary ions to travel in the same direction; and an acceleration tube that accelerates and ejects secondary ions collected by the extraction electrode. (2) The ion gun according to claim 1, further comprising a mass filter that allows only specific ions to pass through in the traveling direction of the secondary ions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8120188U JPH023646U (en) | 1988-06-20 | 1988-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8120188U JPH023646U (en) | 1988-06-20 | 1988-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH023646U true JPH023646U (en) | 1990-01-11 |
Family
ID=31305995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8120188U Pending JPH023646U (en) | 1988-06-20 | 1988-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH023646U (en) |
-
1988
- 1988-06-20 JP JP8120188U patent/JPH023646U/ja active Pending
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