JPH0235166Y2 - - Google Patents

Description

[Detailed description of the invention] (a) Industrial application field This invention relates to a charged particle beam slit that has a simple structure and is easy to assemble.

(b) Prior Art In the conventional charged particle beam slit 1a shown in FIG.
A and a flange 5a having a through hole 6a in the center were superposed in that order, and the three were integrally connected by a bolt 8a via an insulating washer 7a on the flange 5a. A through hole 6 is provided in the flange 5a.
The spring 1 is kept airtight by an O-ring 9a inside the spring 1, and a current introducing rod 11a having an electrode plate 10a at the lower end is attached between the flange 5a and the spring 1.
2a so as to be slidable into the duct 2a. Reference numeral 13a denotes a cylindrical cover fixed to the flange 5a. The cover 13a houses the spring 12a and serves as a guide for the current introduction rod 11a which slides in the vertical direction.

However, in the above configuration, the flange 5 is superimposed on the outward flange 3a via the annular insulating material 4a.
Since the charged particle beam slit 1a has to be connected with the bolt 8a, the slit 1a for the charged particle beam becomes large, and there is an inconvenience that it requires a lot of effort to assemble.

(c) Purpose This invention was made in view of these circumstances, and one of its main purposes is to simplify the structure of the device and facilitate assembly by omitting the use of insulating flanges. The object of the present invention is to provide a slit for charged particle beams that can perform the following steps.

(d) Structure of the device In this device, a screw attachment member having a through hole is integrally provided on the side wall of the beam duct, an electrode is provided at the tip inside the duct in the through hole of the screw attachment member, and a hollow insulating sleeve is provided in the body. The current introducing rod equipped with the insulating sleeve is mounted so that it can be pushed into the duct against the biasing force of the spring while maintaining an airtight state, and a protective tube surrounding the outside of the hollow insulating sleeve is screwed onto the screw mounting member. This is a slit for particle beams.

(E) Example This invention will be described in detail below based on the example shown in FIG. Note that this invention is not limited to this.

FIG. 2 is a longitudinal cross-sectional view of the charged particle beam slit 1 according to this invention, and shows the beam duct 2.
A screw mounting member 3 having an annular groove 5 in a through hole 4 in the center and a screw 6 formed on the outer periphery is integrally provided on the outer wall of the housing. Reference numeral 7 denotes a current introduction rod that guides the ion beam current inside the duct 2 to the outside of the duct 2. The current introduction rod 7 has a rectangular electrode 8 fixed to its tip inserted into the duct 2. A hollow insulating sleeve 9 having a flange 10 at its upper end is integrally attached to the narrow body above the attachment part. The current introducing rod 7 is insulated from the duct 2 by installing the hollow insulating sleeve 9, and the inside and outside of the duct 2 are airtightly partitioned by the O-ring 11 fitted into the annular groove 5 of the screw mounting member 3. A spring 12 inserted between the screw attachment member 3 and the flange 10 allows the flange 10 to be pushed into the duct 2. On the outside of the spring 12, when the upper part of the current introducing rod 7 is pressed into the duct 2 by a micrometer head (not shown), the flange 10 of the hollow insulating sleeve 9 is guided, and the duct 2 and the current introducing rod 7 An insulating tube 13 serving as a protective tube for ensuring insulation from the screw attachment member 3 is screwed onto the threaded portion 6 of the screw attachment member 3.

In the apparatus configured as described above, when it is desired to measure the value of the ion beam current flowing in the duct 2 maintained in a vacuum, the current introduction rod 7 is held by the spring 12 outside the path through which the ion beam current flows.
If the electrode 8 is pushed against the biasing force of the spring 12 to the position where it collides with the ion beam current using the micrometer head, a vacuum can be obtained with the electrode 8 while maintaining the vacuum inside the duct 2 by the O-ring 11. The ion beam current value can be guided out of the duct 2 through the current introducing rod 7 which is insulated from the duct 2 by the hollow insulating sleeve 9 and the insulating cylinder 13 and measured. After the measurement is completed, when the pushing by the micrometer head is released, the current introducing rod 7 is moved by the biasing force of the spring 12 acting on the flange 10 to the original position where the electrode 8 does not collide with the ion beam current. .

In this configuration, the current introduction rod 7 that guides the ion beam current to the outside of the duct 2 is connected to the duct 2 by a hollow insulating sleeve 9 attached to the outer circumference formed slightly thinner.
Since the screw attachment member 3 is insulated from the beam duct 2, the insulating tube 13 can be attached by directly screwing the screw attachment member 3 to the beam duct 2. Therefore, by omitting the conventional flanges 3a, 5a and annular insulating material 4a, the structure can be made small and simple, and manufacturing costs can be reduced. In addition, the insulating tube 13 that insulates the current introduction rod 7 from the duct 2 is directly screwed into the screw attachment member 3 provided on the duct 2, without using the bolt 8a as in the conventional case, so it is easy to assemble the device. The number of steps required can also be reduced.

(f) Effects of the device This device insulates the current introducing rod from the duct side with a hollow insulating sleeve attached to it, integrates a screw attachment member into the duct, and directly screws the protective tube into the screw attachment member. This eliminates the conventional complicated flange structure with insulation function, making this type of equipment compact and simple, reducing costs, and making it easy to assemble. be able to.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal cross-sectional view of a conventional embodiment, and FIG. 2 is a longitudinal cross-sectional view of an embodiment of this invention. 1... Slit for charged particle beam, 2... Duct, 3... Screw mounting member, 4... Through hole, 7...
... Current introduction rod, 8 ... Electrode, 9 ... Hollow insulating sleeve, 12 ... Spring, 13 ... Insulating cylinder.

Claims (1)

[Scope of utility model registration request] A screw attachment member having a through hole is integrally provided on the side wall of the beam duct, and a current introducing rod, which has an electrode at the tip inside the duct and a hollow insulating sleeve attached to the body, is airtightly inserted into the through hole of the screw attachment member. A slit for a charged particle beam, characterized in that the slit can be mounted so as to be pushed into a duct against the biasing force of a spring while maintaining its state, and a protective cylinder surrounding the outside of the hollow insulating sleeve is screwed to the screw mounting member. .