JPH0235102Y2 - - Google Patents

Info

Publication number
JPH0235102Y2
JPH0235102Y2 JP13296886U JP13296886U JPH0235102Y2 JP H0235102 Y2 JPH0235102 Y2 JP H0235102Y2 JP 13296886 U JP13296886 U JP 13296886U JP 13296886 U JP13296886 U JP 13296886U JP H0235102 Y2 JPH0235102 Y2 JP H0235102Y2
Authority
JP
Japan
Prior art keywords
bypass
valve
main valve
box
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13296886U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6340664U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13296886U priority Critical patent/JPH0235102Y2/ja
Publication of JPS6340664U publication Critical patent/JPS6340664U/ja
Application granted granted Critical
Publication of JPH0235102Y2 publication Critical patent/JPH0235102Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
  • Details Of Valves (AREA)
JP13296886U 1986-08-30 1986-08-30 Expired JPH0235102Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13296886U JPH0235102Y2 (enrdf_load_stackoverflow) 1986-08-30 1986-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13296886U JPH0235102Y2 (enrdf_load_stackoverflow) 1986-08-30 1986-08-30

Publications (2)

Publication Number Publication Date
JPS6340664U JPS6340664U (enrdf_load_stackoverflow) 1988-03-16
JPH0235102Y2 true JPH0235102Y2 (enrdf_load_stackoverflow) 1990-09-21

Family

ID=31032848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13296886U Expired JPH0235102Y2 (enrdf_load_stackoverflow) 1986-08-30 1986-08-30

Country Status (1)

Country Link
JP (1) JPH0235102Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3543963B2 (ja) * 2001-05-14 2004-07-21 東京エレクトロン株式会社 熱処理装置

Also Published As

Publication number Publication date
JPS6340664U (enrdf_load_stackoverflow) 1988-03-16

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