JPH0235102Y2 - - Google Patents
Info
- Publication number
- JPH0235102Y2 JPH0235102Y2 JP13296886U JP13296886U JPH0235102Y2 JP H0235102 Y2 JPH0235102 Y2 JP H0235102Y2 JP 13296886 U JP13296886 U JP 13296886U JP 13296886 U JP13296886 U JP 13296886U JP H0235102 Y2 JPH0235102 Y2 JP H0235102Y2
- Authority
- JP
- Japan
- Prior art keywords
- bypass
- valve
- main valve
- box
- valve body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 description 8
- 239000012530 fluid Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000002826 coolant Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Lift Valve (AREA)
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13296886U JPH0235102Y2 (US20020128544A1-20020912-P00008.png) | 1986-08-30 | 1986-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13296886U JPH0235102Y2 (US20020128544A1-20020912-P00008.png) | 1986-08-30 | 1986-08-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6340664U JPS6340664U (US20020128544A1-20020912-P00008.png) | 1988-03-16 |
| JPH0235102Y2 true JPH0235102Y2 (US20020128544A1-20020912-P00008.png) | 1990-09-21 |
Family
ID=31032848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13296886U Expired JPH0235102Y2 (US20020128544A1-20020912-P00008.png) | 1986-08-30 | 1986-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0235102Y2 (US20020128544A1-20020912-P00008.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3543963B2 (ja) * | 2001-05-14 | 2004-07-21 | 東京エレクトロン株式会社 | 熱処理装置 |
-
1986
- 1986-08-30 JP JP13296886U patent/JPH0235102Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6340664U (US20020128544A1-20020912-P00008.png) | 1988-03-16 |
