JPH0235072U - - Google Patents
Info
- Publication number
- JPH0235072U JPH0235072U JP11455188U JP11455188U JPH0235072U JP H0235072 U JPH0235072 U JP H0235072U JP 11455188 U JP11455188 U JP 11455188U JP 11455188 U JP11455188 U JP 11455188U JP H0235072 U JPH0235072 U JP H0235072U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- electrode
- probe card
- measurement signal
- insulating substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 8
- 238000005259 measurement Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例を示す平面図、第２
図は第１図のＡ−Ａ線に沿う矢視方向の縦断面図
、第３図は第２図のＢ部の拡大図、第４図は従来
例を示す平面図、第５図は第４図のＣ−Ｃ線に沿
う矢視方向の縦断面図、第６図は第５図のＤ部の
拡大図である。
主要部分の符号の説明、１ａ，１ｂ……プロー
ブピン、２……カード、２１ａ，２１ｂ……電極
、２２ａ，２２ｂ……絶縁体の膜。
Fig. 1 is a plan view showing one embodiment of the present invention;
The figure is a longitudinal cross-sectional view taken along the line A-A in Figure 1, Figure 3 is an enlarged view of section B in Figure 2, Figure 4 is a plan view showing the conventional example, and Figure 5 is the 4 is a vertical cross-sectional view in the direction of arrows taken along the line CC, and FIG. 6 is an enlarged view of section D in FIG. 5. Explanation of symbols of main parts: 1a, 1b...probe pin, 2...card, 21a, 21b...electrode, 22a, 22b...insulator film.
Claims (1)
ブピンを絶縁基板上に搭載したプローブカードで
あつて、前記絶縁基板の表面および裏面に設けら
れ、前記プローブピンにより抽出された前記測定
信号を測定装置に導くための電極と、前記プロー
ブピンと前記電極との接続部を被覆する絶縁部材
とを有することを特徴とするプローブカード。 A probe card is provided with probe pins mounted on an insulating substrate to extract a measurement signal by contacting an object to be measured, the probe card being provided on the front and back surfaces of the insulating substrate and measuring the measurement signal extracted by the probe pins. 1. A probe card comprising: an electrode for guiding the probe to a device; and an insulating member covering a connecting portion between the probe pin and the electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11455188U JPH0235072U (en) | 1988-08-31 | 1988-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11455188U JPH0235072U (en) | 1988-08-31 | 1988-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0235072U true JPH0235072U (en) | 1990-03-06 |
Family
ID=31355405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11455188U Pending JPH0235072U (en) | 1988-08-31 | 1988-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0235072U (en) |
-
1988
- 1988-08-31 JP JP11455188U patent/JPH0235072U/ja active Pending
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