JPH023465U - - Google Patents
Info
- Publication number
- JPH023465U JPH023465U JP8075888U JP8075888U JPH023465U JP H023465 U JPH023465 U JP H023465U JP 8075888 U JP8075888 U JP 8075888U JP 8075888 U JP8075888 U JP 8075888U JP H023465 U JPH023465 U JP H023465U
- Authority
- JP
- Japan
- Prior art keywords
- drive shaft
- parallel link
- holder
- vertical movement
- rotary drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8075888U JPH023465U (de) | 1988-06-18 | 1988-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8075888U JPH023465U (de) | 1988-06-18 | 1988-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH023465U true JPH023465U (de) | 1990-01-10 |
Family
ID=31305574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8075888U Pending JPH023465U (de) | 1988-06-18 | 1988-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH023465U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019218621A (ja) * | 2018-06-22 | 2019-12-26 | 東京エレクトロン株式会社 | 基板載置台及び成膜装置 |
-
1988
- 1988-06-18 JP JP8075888U patent/JPH023465U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019218621A (ja) * | 2018-06-22 | 2019-12-26 | 東京エレクトロン株式会社 | 基板載置台及び成膜装置 |