JPH0234294A - Bend mirror for laser processing machine - Google Patents

Abstract

PURPOSE:To improve the accuracy of optical axis adjustment by providing a detector for the inclination angle of a mirror holder to the fulcrum part of a mirror holder, converting the inclination angle to information on the position of the optical axis in accordance with the angle detection signal and displaying the information. CONSTITUTION:The angle detector 14 consisting of a joystick controller is disposed to the position of the fulcrum rod of the mirror holder 1. A personal computer 15 which is inputted with the detection signal of the angle detector 14 and makes computation to convert said signal to the information on the position of a laser beam and a display device 16 are connected and disposed to the angle detector 14. The computer, 15 processes the angle detection signal of the angle detector 14 to convert the same to the information on the position of the optical axis and displays the result on the display 16. An operator operates a micrometer 6 while observing the display on the display 16. The accuracy of the optical axis adjustment is improved in this way.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a bend mirror for adjusting the optical axis of a laser processing device.

[Prior Art] Conventionally, a laser processing device includes a laser beam oscillator, a bend mirror that bends and transmits the laser beam oscillated from the oscillator, and a lens that focuses the laser beam transmitted by the bend mirror. Those that have are commonly used.

The bend mirror of the conventional laser processing equipment as mentioned above,
3(a), (b) and FIG. 4 will be explained.

3(a) and 3(b) are a front view and a side sectional view of the bend mirror, and FIG. 4 is an enlarged sectional view of the micrometer mounting portion. In these figures, 1 is a mirror holder, 2 is a mirror attached to mirror holder l, and mirror 3 is attached to mirror holder l.
This is the base plate that supports the.

Further, 4 is a compression coil spring, 5 is a bolt screwed into the base plate 3, and the bolt 5 movably penetrates the mirror holder l in the thickness direction, and the head of the bolt 5 and the mirror holder l
The mirror holder 1 is pressed against the base plate 3 by a compression coil spring 4 interposed between the mirror holder 1 and the base plate 3. Further, the bolts 5 and the springs 4 are arranged at three locations in the circumferential direction of the mirror holder l and the base plate 3. Micrometers 6 are mounted at two circumferential locations adjacent to the bolts 5 on both sides of the mirror holder 1 via a spindle 9;
is the center of the circumferential direction between the micrometers 6 and the mirror holder 1
8.10 is the fulcrum rod that supports the base plate 3 on the base plate 3.
11 is a cooling pipe fixed to the mirror holder l; 12 is a cooling pipe connected to the cooling lid 11 to flow cooling water into the mirror holder l; 13 is a mirror 2 to the mirror holder l.

Next, the operation of this bend mirror will be explained. By rotating the micrometer 6, the mirror holder 1 rotates the spindle 9 to advance and retreat, thereby pushing the spindle receiver 10. Due to the reaction, the mirror holder 1 tilts together with the mirror 2 using the fulcrum rod 7 as a fulcrum, and the mirror 2 bends the laser beam emitted from the oscillator (not shown) and adjusts its optical axis to match a predetermined direction. do. Furthermore, due to the compression coil spring 4 and the bolt 5,
The mirror holder 1 is flexibly held by constantly pushing against the base plate 3, and the mirror 2 is cooled by circulating cooling water through the mirror holder 1 through the cooling piping 12.

[Problems to be Solved by the Invention] The bend mirror of the conventional laser processing device is configured as described above, and when adjusting the optical axis, the accurate reference state of the mirror 2 attached to the mirror holder 1 is not known. For this reason, the operator does not know how much to turn the micrometer 6 to determine the inclination angle (posture) of the mirror 2, and the operator adjusts the inclination angle of the mirror 2 by visual inspection only. There were problems in that axis adjustment was troublesome and accurate adjustment was not possible.

This invention was made to solve the above problems, and it is possible to know the attitude of the mirror attached to the mirror holder, and also to simulate the position of the optical axis. The object of the present invention is to obtain a bend mirror for a laser processing device that allows easy and accurate optical axis adjustment.

[Means for Solving the Problems] The bend mirror of the laser processing device according to the present invention includes an angle detector for detecting the inclination angle of the mirror holder at a fulcrum portion that supports the mirror holder on a base plate. The angle detection signal from the laser beam is converted into the optical axis position of the laser beam and displayed on the display.

Function] The bend mirror of the laser processing device of the present invention converts the angle detection signal from the angle detector into laser beam position information, displays it on the display, and simulates it, thereby detecting the position of the microscopic beam while looking at the optical axis position. The inclination angle (posture) of the mirror holder can be easily and accurately adjusted using a meter or the like.

[Example] An example of the present invention will be described below as shown in Figs. 1(a) and (b).
and FIG. 2 will be explained.

In FIGS. 1(a), (b) and 2, reference numerals 1 to 6.9.10 are the same as the parts with the same reference numerals shown in FIGS. 3(a), (b) and FIG. Further, 14 is an angle detector consisting of a joystick controller that detects the attitude, that is, the inclination, of the mirror 2 held in the mirror holder l, and issues a signal.The angle detector 14 detects the attitude, that is, the inclination angle, of the mirror 2. It outputs a signal and is disposed at the position of a conventional fulcrum rod to support the mirror holder on the base plate 3. 15 is a personal computer that manually inputs the detection signal of the angle detector 14 and converts it into laser beam position information; 16 is the computer 1 mentioned above;
This is a display that receives the results of information processing performed by No. 5 and displays the results. The configuration of this embodiment other than that described above is the same as the conventional one shown in FIGS. 3(a) and 3(b) and FIG. 2.

The bend mirror of the laser processing apparatus according to this embodiment rotates the micrometer 6 using the angle detector 14 consisting of a joystick controller as a fulcrum, thereby rotating the spindle 9 to move it forward and backward and pushing the spindle receiver 10.

Due to this reaction, the mirror holder 1 is tilted with respect to the base plate 3, and the mirror 2 mounted on the mirror holder 1 is aligned with the optical axis. During this adjustment, the angle detector 14 consisting of a joystick controller detects the tilt angle of the mirror holder l and issues a detection signal. The personal computer 15 receives this detection signal, converts it into optical axis position information, performs arithmetic processing, and displays the processing result on the display 16.The operator operates the micrometer 6 while looking at this display to determine the optical axis position. Make adjustments.

[Effects of the Invention] As explained above, according to the present invention, an angle detector is provided at the fulcrum of the optical axis adjustment part of the bend mirror, and the optical axis position can be visually understood on the display, so that the optical axis adjustment is easy. It has the effect of being easy and accurate.

[Brief explanation of the drawing]

1(a) and (b) are a front view and a side sectional view showing a bend mirror of a laser processing apparatus according to an embodiment of the present invention, FIG. 2 is an enlarged sectional view of the same micrometer attachment part, and FIG. (a) and (b) are a front view and a side sectional view showing a bend mirror of a conventional laser processing device;
Figure 4 shows the micrometer equipment. It is an enlarged cross-sectional view of the wearing part. l... Mirror holder, 2... Mirror, 3... Base plate, 4... Compression coil spring, 5... Bolt, 6...
... Micrometer, 14... Joystick controller (angle detector), 15... Personal computer, 16... Display. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.

Claims (1)

[Claims] A bend mirror for a laser processing device including a laser beam oscillator, a bend mirror that bends and transmits the laser beam oscillated from the oscillator, and a lens that focuses the laser beam transmitted by the bend mirror, the mirror An angle detector that detects the inclination angle of the mirror holder is installed at the fulcrum part that supports the mirror holder mounted on the base plate so that the inclination angle can be adjusted, and the angle detection signal from this detector is used as information on the position of the laser beam. A bend mirror for laser processing equipment, characterized by comprising a display that converts and displays the data.