JPH0233978U - - Google Patents
Info
- Publication number
- JPH0233978U JPH0233978U JP11224688U JP11224688U JPH0233978U JP H0233978 U JPH0233978 U JP H0233978U JP 11224688 U JP11224688 U JP 11224688U JP 11224688 U JP11224688 U JP 11224688U JP H0233978 U JPH0233978 U JP H0233978U
- Authority
- JP
- Japan
- Prior art keywords
- piezo stack
- control valve
- valve
- supported
- valve body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988112246U JP2516824Y2 (ja) | 1988-08-27 | 1988-08-27 | 制御弁 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988112246U JP2516824Y2 (ja) | 1988-08-27 | 1988-08-27 | 制御弁 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0233978U true JPH0233978U (en:Method) | 1990-03-05 |
| JP2516824Y2 JP2516824Y2 (ja) | 1996-11-13 |
Family
ID=31351010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988112246U Expired - Fee Related JP2516824Y2 (ja) | 1988-08-27 | 1988-08-27 | 制御弁 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2516824Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010230159A (ja) * | 2009-03-27 | 2010-10-14 | Horiba Stec Co Ltd | 流量制御弁 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4603207B2 (ja) * | 2001-08-08 | 2010-12-22 | 株式会社堀場製作所 | ガス希釈システム |
| JP5943549B2 (ja) * | 2011-02-24 | 2016-07-05 | 株式会社不二工機 | 電動弁 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5965491A (ja) * | 1982-10-06 | 1984-04-13 | Hitachi Ltd | ピエゾ式微小変位装置 |
| JPS61127983A (ja) * | 1984-11-27 | 1986-06-16 | Esutetsuku:Kk | 流体制御用バルブ |
| JPS62124373A (ja) * | 1985-11-21 | 1987-06-05 | Yamada Mie | 制御器 |
| JPS62215177A (ja) * | 1986-03-14 | 1987-09-21 | Nok Corp | 三方弁 |
| JPS63140179A (ja) * | 1986-12-01 | 1988-06-11 | Esutetsuku:Kk | 微少流量制御弁 |
-
1988
- 1988-08-27 JP JP1988112246U patent/JP2516824Y2/ja not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5965491A (ja) * | 1982-10-06 | 1984-04-13 | Hitachi Ltd | ピエゾ式微小変位装置 |
| JPS61127983A (ja) * | 1984-11-27 | 1986-06-16 | Esutetsuku:Kk | 流体制御用バルブ |
| JPS62124373A (ja) * | 1985-11-21 | 1987-06-05 | Yamada Mie | 制御器 |
| JPS62215177A (ja) * | 1986-03-14 | 1987-09-21 | Nok Corp | 三方弁 |
| JPS63140179A (ja) * | 1986-12-01 | 1988-06-11 | Esutetsuku:Kk | 微少流量制御弁 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010230159A (ja) * | 2009-03-27 | 2010-10-14 | Horiba Stec Co Ltd | 流量制御弁 |
| US8844901B2 (en) | 2009-03-27 | 2014-09-30 | Horiba Stec, Co., Ltd. | Flow control valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2516824Y2 (ja) | 1996-11-13 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |