JPH0233431U - - Google Patents
Info
- Publication number
- JPH0233431U JPH0233431U JP11227588U JP11227588U JPH0233431U JP H0233431 U JPH0233431 U JP H0233431U JP 11227588 U JP11227588 U JP 11227588U JP 11227588 U JP11227588 U JP 11227588U JP H0233431 U JPH0233431 U JP H0233431U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- wiring
- laminating
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910018125 Al-Si Inorganic materials 0.000 claims description 2
- 229910018520 Al—Si Inorganic materials 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
第１図は本考案による配線の一実施例を設けて
なるＭＯＳ ＬＳＩの要部を示す断面図、第２図
は配線の寿命特性を示す図、第３図は本考案の他
の実施例を設けてなるＭＯＳ ＬＳＩの要部を示
す断面図である。 ８，９……配線、１０……Ａｌ―Ｓｉ層、１１
……Ａｌ―Ｓｉ―Ａｓ層。
なるＭＯＳ ＬＳＩの要部を示す断面図、第２図
は配線の寿命特性を示す図、第３図は本考案の他
の実施例を設けてなるＭＯＳ ＬＳＩの要部を示
す断面図である。 ８，９……配線、１０……Ａｌ―Ｓｉ層、１１
……Ａｌ―Ｓｉ―Ａｓ層。
Claims (1)
- 【実用新案登録請求の範囲】 １ Ａｌ―Ａｓ又はＡｌ―Ｓｉ―Ａｓからなる配
線。 ２ Ａｌ層又はＡｌ―Ｓｉ層上にＡｌ―Ａｓ層又
はＡｌ―Ｓｉ―Ａｓ層を積層してなる配線。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11227588U JPH0233431U (ja) | 1988-08-26 | 1988-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11227588U JPH0233431U (ja) | 1988-08-26 | 1988-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0233431U true JPH0233431U (ja) | 1990-03-02 |
Family
ID=31351066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11227588U Pending JPH0233431U (ja) | 1988-08-26 | 1988-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0233431U (ja) |
-
1988
- 1988-08-26 JP JP11227588U patent/JPH0233431U/ja active Pending