JPH0233427U - - Google Patents
Info
- Publication number
- JPH0233427U JPH0233427U JP11122388U JP11122388U JPH0233427U JP H0233427 U JPH0233427 U JP H0233427U JP 11122388 U JP11122388 U JP 11122388U JP 11122388 U JP11122388 U JP 11122388U JP H0233427 U JPH0233427 U JP H0233427U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer
- side wall
- bottom end
- holding jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988111223U JP2533551Y2 (ja) | 1988-08-26 | 1988-08-26 | 半導体ウエハ保持治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988111223U JP2533551Y2 (ja) | 1988-08-26 | 1988-08-26 | 半導体ウエハ保持治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0233427U true JPH0233427U (de) | 1990-03-02 |
| JP2533551Y2 JP2533551Y2 (ja) | 1997-04-23 |
Family
ID=31349086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988111223U Expired - Lifetime JP2533551Y2 (ja) | 1988-08-26 | 1988-08-26 | 半導体ウエハ保持治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2533551Y2 (de) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS516664A (ja) * | 1974-07-05 | 1976-01-20 | Hitachi Ltd | Itajobutsushijijigu |
| JPS51161071U (de) * | 1975-06-16 | 1976-12-22 | ||
| JPS62201928U (de) * | 1986-06-13 | 1987-12-23 |
-
1988
- 1988-08-26 JP JP1988111223U patent/JP2533551Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS516664A (ja) * | 1974-07-05 | 1976-01-20 | Hitachi Ltd | Itajobutsushijijigu |
| JPS51161071U (de) * | 1975-06-16 | 1976-12-22 | ||
| JPS62201928U (de) * | 1986-06-13 | 1987-12-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2533551Y2 (ja) | 1997-04-23 |