JPH0232861Y2 - - Google Patents
Info
- Publication number
- JPH0232861Y2 JPH0232861Y2 JP1986022617U JP2261786U JPH0232861Y2 JP H0232861 Y2 JPH0232861 Y2 JP H0232861Y2 JP 1986022617 U JP1986022617 U JP 1986022617U JP 2261786 U JP2261786 U JP 2261786U JP H0232861 Y2 JPH0232861 Y2 JP H0232861Y2
- Authority
- JP
- Japan
- Prior art keywords
- dust
- dry
- particles
- wet
- intake
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 claims description 52
- 239000002245 particle Substances 0.000 claims description 44
- 238000011144 upstream manufacturing Methods 0.000 claims description 16
- 230000000694 effects Effects 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
Landscapes
- Filtering Materials (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986022617U JPH0232861Y2 (US20030204162A1-20031030-M00001.png) | 1986-02-19 | 1986-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986022617U JPH0232861Y2 (US20030204162A1-20031030-M00001.png) | 1986-02-19 | 1986-02-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62133957U JPS62133957U (US20030204162A1-20031030-M00001.png) | 1987-08-24 |
| JPH0232861Y2 true JPH0232861Y2 (US20030204162A1-20031030-M00001.png) | 1990-09-05 |
Family
ID=30820170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986022617U Expired JPH0232861Y2 (US20030204162A1-20031030-M00001.png) | 1986-02-19 | 1986-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0232861Y2 (US20030204162A1-20031030-M00001.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007119648A1 (ja) * | 2006-04-07 | 2007-10-25 | Tokyo Electron Limited | 気体清浄装置および半導体製造装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6147483B2 (US20030204162A1-20031030-M00001.png) * | 1980-03-11 | 1986-10-20 | Kubota Ltd |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6147483U (ja) * | 1984-08-31 | 1986-03-29 | 株式会社 土屋製作所 | プレフイルタ付エアクリ−ナ |
-
1986
- 1986-02-19 JP JP1986022617U patent/JPH0232861Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6147483B2 (US20030204162A1-20031030-M00001.png) * | 1980-03-11 | 1986-10-20 | Kubota Ltd |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62133957U (US20030204162A1-20031030-M00001.png) | 1987-08-24 |
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