JPH0232292A - Fluid type xy table - Google Patents

Abstract

PURPOSE:To decrease the number of movable components and to simplify the constitution by forming an X-axial cylinder and a Y-axial cylinder in a single cylinder block. CONSTITUTION:When pressurized oil is supplied to a supply port 4 for X-axial forward movement through the operation of an X-axial electromagnetic servo valve and a supply port 5 for X-axial backward movement is connected to a tank, the pressurized oil is supplied to the X-axial cylinder through the oil path of an X-axial piston rod 8 and a cylinder block 10 moves forth under the guidance of feed and discharge rods 6 and 7 and X-axial piston rods 8 and 9 and is positioned. Then when the pressurized oil is supplied to a supply port 2 for Y-axial right movement through a Y-axial electromagnetic servo valve and a supply port 3 for Y-axial left movement is connected to the tank, the pressurized oil is supplied to the Y-axial cylinder through the oil path of a rod 6 and a working table 21 moves right through the Y-axial piston rod and is positioned. Namely, the X-axal and Y-axial cylinders are formed on the block 10, so movable parts as to a fixed base 1 are two members, i.e. the block 10 and table 21, so that two-stage stack constitution is obtained.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a fluid that positions a work table in the X-axis and Y-axis directions using fluid pressure such as hydraulic pressure or pneumatic pressure (hereinafter referred to as "hydraulic pressure"). Expression related to XY child table.

[Prior Art] Generally, in machine tools, press molding machines, transfer machines, industrial robots, etc., hydraulic XY child tables are widely used to position workpieces in the X-axis and Y-axis directions.

A conventional hydraulic XY child table consists of an a work table movably provided on the Y-axis table guided by the guide groove of the Y-axis table; and a work table provided on the X-axis side of the X-axis table to move the Y-axis table in the The working table is generally composed of an X-axis actuator for slidingly displacing the work table in the Y-axis direction, and a Y-axis actuator provided on the X-axis side of the Y-axis table for slidingly displacing the work table in the Y-axis direction.

As the X-axis and Y-axis actuators, a rotary actuator combining a hydraulic motor and a ball screw, or a reciprocating actuator using a hydraulic cylinder is used.

By operating the hydraulic XY child table and the X-axis actuator configured in this way, the X-axis table, Y
By moving the axis tables together and operating the Y-axis actuator, the work table is moved and positioned at a desired position. And hydraulic XY
Since pressure oil is used as the slave table drive and control medium, by appropriately selecting the hydraulic source and hydraulic actuator, a large driving force can be generated, even with heavy loads and large XY slave tables. It can operate smoothly, and with recent advances in hydraulic servo valves,
High-precision positioning of about 10 μm has become possible.

[Problem to be solved by the invention]

However, the prior art XY child table has the following drawbacks. First, the X-axis table that serves as a fixed base, and 3g)
(A Y-axis table that is movable in the X-axis direction on the axis table and a work table that is movable in the Y-axis direction on the top of the Y-axis table are stacked in three stages in the height direction. It has the drawbacks that its shape is complicated and its height is large.This drawback also applies to the electric XY child table.

Second, the X-axis actuator and Y-axis actuator move the Y-axis table and work table using a single ball screw shaft or piston rod, and as mentioned in the first point, the height is high. Since the directional dimension is large, a rotational moment is likely to be generated on the work table, and the positioning accuracy in the Z-axis direction is likely to decrease.

Third, since the X-axis and Y-axis actuators are attached externally to the side surfaces of the X-axis and Y-axis tables, the shape becomes larger by the amount of actuators attached, and the Y-axis actuator is Since it is provided on the shaft table, it has the disadvantage that flexible piping must be used as the hydraulic conduit. Furthermore, when an actuator consisting of a hydraulic motor and a ball screw is used, there is a drawback that position control errors are likely to occur due to the play between the ball and the nut and the torsional springiness of the ball screw.

The present invention was made in view of the drawbacks of the prior art, and by incorporating the X-axis and Y-axis actuators into a single cylinder block, the shape of the cylinder block can be significantly reduced.
Simplify and aim at rotational moment.

[Means for Solving the Problems] In order to achieve the above object, the present invention includes a fixed base serving as a base, both ends of which are fixed in the X-axis direction, and a Y-axis fluid is supplied in the axial direction. At least two supply/discharge rods each having a fluid passage to be discharged are fixed at both ends in the X-axis direction of the fixed table in parallel with each supply/discharge rod, and supply/discharge fluid for the X-axis in the axial direction. at least two X-axis piston rods each having a piston in the axially intermediate position, a cylinder block movably disposed on the fixed base in the X-axis direction, and the cylinder block A supply/discharge rod sliding hole is formed in the X-axis direction of the cylinder block and slides and guides each of the supply/discharge rods, and a supply/discharge rod sliding hole is formed in the cylinder block coaxially with each supply/discharge rod sliding hole, and a fluid chamber into which Y-axis fluid is supplied and discharged via a rod; an X-axis piston rod sliding hole that is bored in the X-axis direction of the cylinder block and slides and guides each of the X-axis piston rods; A hole is formed in the cylinder block coaxially with each X-axis piston rod sliding hole, into which a piston of each X-axis piston rod is inserted, and an X-axis fluid is supplied and discharged through each X-axis piston rod. By doing so,
an X-axis cylinder that moves the cylinder block in the X-axis direction relative to each piston; a work table movably disposed on the cylinder block in the Y-axis direction; and both ends of the work table in the Y-axis direction. at least one Y-axis piston rod that is fixed and has a piston in the axially intermediate position; and a Y-axis piston rod sliding hole that is bored in the Y-axis direction of the cylinder block and that slides and guides the Y-axis piston rod. , formed in the cylinder block coaxially with the Y-axis piston rod sliding hole, into which the piston of the Y-axis piston rod is inserted, and the Y-axis fluid is supplied and discharged through each of the fluid chambers, The present invention is comprised of a Y-axis cylinder that moves the work table in the Y-axis direction integrally with the Y-axis piston rod.

[For production]

With this configuration, when the X-axis fluid is supplied and discharged from the fluid passage of each X-axis piston rod to the X-axis cylinder, the X-axis cylinder slides relative to the piston of the X-axis piston rod, A cylinder block forming the X-axis cylinder is displaced in the X-axis direction. Furthermore, when the Y-axis fluid is supplied and discharged to and from the Y-axis cylinder through the fluid passages of each supply/discharge rod and the fluid chamber of the cylinder block, the Y-axis piston rod slides in the Y-axis direction with respect to the cylinder block. , corresponding Y
The work table integrated with the axial piston rod is displaced in the Y-axis direction, and the work table as a whole is positioned in the X-axis and Y-axis directions.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

In the drawing, 1 is a fixed base serving as a base, and the fixed base l
is a board part IA, and end plates IB and I formed to be bent upward at the front and rear ends of the board part IAOX in the axial direction.
It is composed of C.

The front end play 1-IB is provided with a Y-axis rightward supply port 2 and a Y-axis supply boat 3 on both sides in the width direction, and between these is an X-axis advance supply port 2. A boat 4 and a supply boat 5 for X-axis retraction are provided.

6.7 are two supply/discharge rods located on both sides of the fixed base 1 in the width direction, and fixed at both ends between the end plate IB and IC so as to be parallel to the X axis. An oil passage 6A is drilled in the axial direction, one end of the acid oil passage 6A communicates with the Y-axis supply boat 2, and a radial armhole 6B is bored in the middle in the axial direction. Further, the other supply/discharge rod 7 also has an oil passage 7A bored in the axial direction, and an acid oil passage 7A.
One end communicates with the supply boat 3 for the Y-axis direction, and a sleeve hole 7B is bored in the radial direction in the axial middle thereof.

8.9 are arranged in parallel so as to be sandwiched between the feeding rods 6.7, and both ends thereof are end plays 1-IB.

Two X-axis piston rods are fixed between the ICs, and one of the X-axis piston rods 8 has a piston 8A in the middle in the axial direction.
An oil passage 8B is formed in the axial direction, and one end thereof communicates with the X-axis advance supply boat 4, and the piston 8A is provided with an oil filler 8C that opens into an oil chamber 17A, which will be described later. ing. Further, the other X-axis piston rod 9 also has a piston 9A formed in the axial middle, and an oil passage 9B in the axial direction.
is bored and one end communicates with the X-axis retraction supply boat 5, and the piston 9A is provided with an open oil reservoir 9C in an oil chamber 18B, which will be described later.

Reference numeral 10 denotes a cylinder block formed in the shape of a rectangular parallelepiped. The cylinder block 10 is disposed on the upper surface side of the base plate part IA of the fixed base 1, and is connected to a supply/discharge rod 6.7 and an X-axis piston rod 8.9.
The working table 21 is guided in the X-axis direction by the Y-axis piston rod 22, which will be described later.

Here, reference numerals 11, 11, 12, and 12 indicate supply/discharge rod slides that are bored on the lower surface side of the cylinder block 10 on both sides in the X-axis direction so as to be coaxial with the supply/discharge loft 6.7. Each sliding hole 11, 12 is a moving hole, and each sliding hole 11, 12 has a supply/discharge rod 6.
．． 7 is slidably inserted. Reference numeral 13.14 denotes a hydraulic chamber formed in the cylinder block 10 coaxially with the supply/discharge rod sliding hole 11.11.12.12. Wandering rod sliding hole 11,
12, and when the wandering rod 6.7 is inserted, it is defined as an annular oil chamber, and the oil chamber 6.
Y-axis circumferential pressure oil is supplied and discharged via B and 7B, respectively.

15.15.16.16 are the supply/discharge rod sliding holes 11.
12 and the same axis as the X-axis piston rod 8.9. A piston rod 8.9 is slidably inserted therethrough.

17.18 is the X-axis piston rod sliding hole 15, 15
．． 16° and 16, and are formed in the cylinder block 10 coaxially therewith. 8A and 9A are slidably inserted, and two oil chambers 17A are formed inside thereof.

17B, 18A, and 18B, respectively.

Here, the oil chambers 17A and 18A communicate with each other via an oil passage 19 bored in the cylinder block 10, and the oil chambers 17B and 18B communicate with each other via another oil passage 20. The oil chamber 17A communicates with the X-axis advancement supply port '4 via the oil filler 8C, and the oil chamber 1BB communicates with the X-axis retreat supply port 5 via the oil filler 9C.

Next, reference numeral 21 denotes a work table formed in the shape of a long plate, and the work table 21 has a workpiece mounting plate 21A and a front and rear end of the workpiece mounting plate 21A in the Y-axis direction so as to be bent downward. 21B and 21C.

22.22.22 is the end play 1 of the work table 21
A piston 22A is formed at the axial center of each Y-axis piston rod 22, which is comprised of three Y-axis piston rods located between -21B and 21C and fixed so as to be parallel to the Y-axis.

23.23. . . . are Y-axis piston rod sliding holes drilled in the cylinder block 10 on the upper surface side of the cylinder block 10 so as to be located on both sides in the Y-axis direction and coaxial with each Y-axis piston rod 22. , a Y-axis piston rod 22 is slidably inserted into each of the sliding holes 23.

24.24.24 is the Y-axis piston rod sliding hole 23
．． Cylinder block 1 is located between 23 and coaxial with these.
0, each Y-axis cylinder 24 is formed to have approximately the same diameter as the piston 22A, each piston 22A is slidably inserted, and two Oil chamber 24A.

24B, respectively. Here, one oil chamber 2
4A, 24A, and 24A communicate with the hydraulic chamber 13 through upper and lower oil passages 25, 25.25, respectively, which are bored in the cylinder block 10 at positions corresponding to the hydraulic chamber 13. Also, the other oil chamber 24B, 24B, 24
B indicates upper and lower oil passages 26 and 2 bored in the cylinder block 10 at a position corresponding to the hydraulic chamber 14.
It communicates with the hydraulic chamber 14 via 6°26.

Further, in FIG. 6, 27 indicates a 4-point, 3-position X-axis circumferential electromagnetic servo valve, and 28 indicates a 4-point, 3-position Y-axis circumferential electromagnetic servo valve. The side is connected to a hydraulic power source 29 and a tank 30. In addition, the other side of the X-axis peripheral electromagnetic servo valve 27 is connected to the X-axis advance supply boat 4,
It is selectively connected to the supply boat 5 for shaft retraction. Further, the other side of the Y-axis circumferential electromagnetic servo valve 28 is also selectively connected to the Y-axis rightward supply boat 2 and the Y-axis leftward supply port 3. In addition, the X-axis electromagnetic servo valve 2
8, the Y-axis platform row switching position is (c) and the Y-axis direction switching position is (d).

The present embodiment is configured as described above, and its operation will be described next.

Now, when the X-axis circumferential electromagnetic servo valve 27 is set to the switching position (A), pressure oil is supplied from the hydraulic source 29 to the X-axis advance supply boat 4, and the X-axis retreat supply port 5 is connected to the tank 30. be done. As a result, the oil passage 8B of the X-axis piston rod 8
Pressure oil is supplied to the oil chamber 17A of the X-axis cylinder 17 via the oil filler 8C, and also to the oil chamber 18A of the other X-axis cylinder 18 via the oil passage 19. On the other hand,
The oil chambers 17B and 1813 of the shaft cylinders 17 and 18 are oil passages 2
The oil chamber 18B communicates with the tank 30 through the armhole 9C1 of the X-axis piston rod 9 and the oil passage 9B. Thus, the oil chambers 17A, 18A and the oil chambers 17B, 1
8B, the cylinder block 10 is guided by the supply/discharge rod 6.7 and the X-axis piston rod 8.9, moves forward along the X-axis to the right in FIG. is positioned.

Furthermore, when the Y-axis circumferential electromagnetic servo valve 28 is set to the switching position (c), pressure oil is supplied from the hydraulic source 29 to the supply port 2 for the Y-axis column, and the supply boat 3 for the left column of the Y-axis is connected to the tank 30. Connected. As a result, the oil passage 6A of the supply/discharge rod, the oil filler 6
B, each Y-axis cylinder 24 via the hydraulic chamber 13 and oil passage 25
Pressure oil is supplied to the oil chamber 24A, and each of the other oil chambers 2
4B is the oil passage 26, the oil pressure chamber 14, and the oil filler 7B for the supply/discharge rod 7.
, communicates with the tank 30 via the oil passage 7A. Thus, due to the pressure difference between the oil chambers 24A and 24B, the Y-axis piston rod 22 and the work table 21 move to the right in FIG. 5 and are positioned at a desired position.

Furthermore, when the X-axis circumferential electromagnetic servo valve 27 is set to the switching position (b), the cylinder block 10 is moved backward as described above, and when the Y-axis circumferential electromagnetic servo valve 28 is set to the switching position (d), , Y-axis piston rod 22, work table 2
1 goes left.

However, according to this embodiment, since the X-axis cylinders 17 and 18 and the Y-axis cylinder 24 are formed in the cylinder block 10, the movable parts relative to the fixed base 1 are connected to the cylinder block 10 and the work table 21. Only two members are required, resulting in a two-tiered structure. Therefore, not only is the configuration simple, but the number of movable parts is small, so the cumulative error caused by these movable parts can be reduced, and the height dimension can also be made small to prevent the generation of rotational moment. can.

Further, the cylinder block 10 is slidably guided in the X-axis direction by four rods, that is, the supply/discharge rod 6°7 and the X-axis piston rods 8 and 9, and the work table 21 is also guided by three Y-axis piston rods 22. Since it is slidably guided in the axial direction,
Not only does the movement become smooth, but also the generation of rotational moment in the Z-axis direction can be reliably prevented.

Furthermore, the X-axis cylinders 17 and 18 and the Y-axis cylinder 24 are both formed within the cylinder block 10, and the X-axis piston rods 8 and 9 and the Y-axis piston rod 22 are limited only to the movable range of the cylinder block 101 and the work table 21, respectively. Since it can be made long, the overall structure can be extremely compact.

Furthermore, the supply/discharge rod 6.7, the X-axis piston rod 8
．． Since the pressure oil is supplied and discharged through the valve 9, there is no need to use flexible piping, and each electromagnetic turbo valve 27, 28 can be directly mounted on the fixed base 1, eliminating the need for piping. It can be an XY stage.

In the embodiment, there are two X-axis piston rods 8 and 9, but only the right-handed or left-handed piston rods may be two, for a total of three, or a double piston rod may be used, for a total of four.

Further, although the number of Y-axis piston rods 22 is three, it may be any number as long as it is one or more.

On the other hand, although the pistons 8A, 9A, and 22A are formed integrally with each piston rod 8, 9, and 22, a separate piston may be attached using screws, nuts, or the like.

On the other hand, in the embodiment, the lower surface of the cylinder block 10 is brought into contact with the upper surface of the base plate part IA of the fixed base 1, and the cylinder block 1
Although the lower surface of the workpiece mounting plate portion 21A of the work table 21 is shown in the drawing as being in contact with the upper surface of the workpiece mounting plate 21A, this configuration has the advantage that mutual movements are stabilized.

However, in the present invention, it is not necessary to configure it in this way, and between the fixed base 1 and the cylinder block 10,
The cylinder block 10 and the work table 21 may be separated from each other.

Furthermore, an X-axis cylinder 17.1 is attached to the cylinder block 10.
Although it has been described that the X-axis cylinder 1718 and the Y-axis cylinder 24 are provided orthogonally to each other, the X-axis cylinder 1718 and the Y-axis cylinder 24 may be intersected at any angle. Further, the installation posture is not limited to the illustrated state, and it goes without saying that the Y-axis piston rod 22 may be installed so as to move upward or downward, for example.

〔Effect of the invention〕

The hydraulic XY child table according to the present invention is as described in detail above, and the cylinder block is slidably guided in the X-axis direction relative to the fixed base using the supply/discharge rod and the X-axis piston rod, and the Y-axis piston Since the work table is slidably guided in the Y-axis direction relative to the cylinder block using a rod, it is only necessary to form the X-axis cylinder and Y-axis cylinder in a single cylinder block, reducing the number of movable parts. Since the actuators for the X-axis and Y-axis are realized within the cylinder block, the configuration is extremely simple, the height is small, and the supply/discharge rod and
Since the cylinder block is slidably guided by the shaft piston rod, it is possible to prevent generation of rotational moment and improve positioning accuracy.

[Brief explanation of the drawing]

Fig. 1 is an external perspective view of the hydraulic XY child table according to this embodiment, Fig. 2 is a vertical cross-sectional view in the direction of the arrows ■-■ in Figs. 1 and 3, and Fig. 3 is a −■ Cross-sectional view in the direction of the arrow,
4 is a vertical cross-sectional view in the direction of the IV-IV arrow in FIGS. 1 and 3, FIG. 5 is a cross-sectional view in the direction of the V-V arrow in FIG. 4,
FIG. 6 is a hydraulic circuit diagram. ■... Fixed stand, 2, 3, 4.5... Supply port, 6
．． 7... Supply/discharge rod, 6A, 7A... Oil passage, 8.
9...X-axis piston rod, 8A, 9A...piston, 8B, 9B...oil passage, 10...cylinder block, 11.12...supply/discharge rod sliding hole, 13.14
...Hydraulic chamber (fluid chamber), 15.16...X-axis piston rod sliding hole, 17.18...X-axis cylinder, 19
20... Oil path, 21... Work table, 22...
Y-axis piston rod, 23...Y-axis piston rod sliding hole, 24...Y-axis cylinder, 25.26...oil passage. -eyes

Claims (1)

[Claims] A fixed base serving as a base, at least two supply/discharge rods having both ends fixed in the X-axis direction of the fixed base and each having a fluid passage for supplying and discharging fluid for the Y-axis in the axial direction; At least two rods having both ends fixed in the X-axis direction of the fixed base parallel to the supply/discharge rod, each having a fluid passage for supplying and discharging the X-axis fluid in the axial direction, and having a piston in the middle in the axial direction. an X-axis piston rod, a cylinder block movably disposed on the fixed base in the X-axis direction, and a feeder drilled in the X-axis direction of the cylinder block and slidingly guiding each of the supply/discharge rods. a discharge rod sliding hole, a fluid chamber formed in the cylinder block coaxially with each supply and discharge rod sliding hole and into which Y-axis fluid is supplied and discharged via each supply and discharge rod; an X-axis piston rod sliding hole that is bored in the X-axis direction and slides and guides each of the X-axis piston rods; The pistons of the X-axis piston rod are inserted,
An X-axis cylinder that moves the cylinder block in the X-axis direction with respect to each piston by supplying and discharging X-axis fluid through each X-axis piston rod, and an X-axis cylinder that moves the cylinder block in the X-axis direction with respect to each piston; a work table movably disposed on the work table; both ends of the work table are fixed in the Y-axis direction;
at least one Y-axis piston rod having a piston in the middle in the axial direction; a Y-axis piston rod sliding hole bored in the Y-axis direction of the cylinder block and slidingly guiding the Y-axis piston rod; The cylinder block is formed coaxially with the axis piston rod sliding hole, into which the piston of the Y-axis piston rod is inserted, and the fluid for the Y-axis is supplied and discharged through each of the fluid chambers. A fluid-type XY table comprising a piston rod and a Y-axis cylinder that integrally moves the work table in the Y-axis direction.